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Title: Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber

Abstract

A method and apparatus for launching microwave energy to a plasma processing chamber in which the required magnetic field is generated by a permanent magnet structure and the permanent magnet material effectively comprises one or more surfaces of the waveguide structure. The waveguide structure functions as an impedance matching device and controls the field pattern of the launched microwave field to create a uniform plasma. The waveguide launcher may comprise a rectangular waveguide, a circular waveguide, or a coaxial waveguide with permanent magnet material forming the sidewalls of the guide and a magnetization pattern which produces the required microwave electron cyclotron resonance magnetic field, a uniform field absorption pattern, and a rapid decay of the fields away from the resonance zone. In addition, the incorporation of permanent magnet material as a portion of the waveguide structure places the magnetic material in close proximity to the vacuum chamber, allowing for a precisely controlled magnetic field configuration, and a reduction of the amount of permanent magnet material required.

Inventors:
;
Issue Date:
Research Org.:
PLASMAQUEST INC
OSTI Identifier:
879554
Patent Number(s):
6225592
Application Number:
09/153193
Assignee:
ASTeX-PlasmaQuest, Inc. (Wilmington, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
FG03-97ER82459
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

DOUGHTY, FRANK C, and et al]. Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber. United States: N. p., 2001. Web.
DOUGHTY, FRANK C, & et al]. Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber. United States.
DOUGHTY, FRANK C, and et al]. Tue . "Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber". United States. https://www.osti.gov/servlets/purl/879554.
@article{osti_879554,
title = {Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber},
author = {DOUGHTY, FRANK C and et al]},
abstractNote = {A method and apparatus for launching microwave energy to a plasma processing chamber in which the required magnetic field is generated by a permanent magnet structure and the permanent magnet material effectively comprises one or more surfaces of the waveguide structure. The waveguide structure functions as an impedance matching device and controls the field pattern of the launched microwave field to create a uniform plasma. The waveguide launcher may comprise a rectangular waveguide, a circular waveguide, or a coaxial waveguide with permanent magnet material forming the sidewalls of the guide and a magnetization pattern which produces the required microwave electron cyclotron resonance magnetic field, a uniform field absorption pattern, and a rapid decay of the fields away from the resonance zone. In addition, the incorporation of permanent magnet material as a portion of the waveguide structure places the magnetic material in close proximity to the vacuum chamber, allowing for a precisely controlled magnetic field configuration, and a reduction of the amount of permanent magnet material required.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {5}
}

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