Application Of Optical Processing For Growth Of Silicon Dioxide

Sopori, Bhushan L

Title: Application Of Optical Processing For Growth Of Silicon Dioxide

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Abstract

A process for producing a silicon dioxide film on a surface of a silicon substrate. The process comprises illuminating a silicon substrate in a substantially pure oxygen atmosphere with a broad spectrum of visible and infrared light at an optical power density of from about 3 watts/cm.sup.2 to about 6 watts/cm.sup.2 for a time period sufficient to produce a silicon dioxide film on the surface of the silicon substrate. An optimum optical power density is about 4 watts/cm.sup.2 for growth of a 100.ANG.-300.ANG. film at a resultant temperature of about 400.degree. C. Deep level transient spectroscopy analysis detects no measurable impurities introduced into the silicon substrate during silicon oxide production and shows the interface state density at the SiO.sub.2 /Si interface to be very low.

Inventors:

Sopori, Bhushan L ^[1]

Denver, CO

Issue Date:: 1997-06-17

Research Org.:: National Renewable Energy Lab. (NREL), Golden, CO (United States)

OSTI Identifier:: 879324

Patent Number(s):: 5639520

Application Number:: 08/592600

Assignee:: Midwest Research Institute (Kansas City, MO)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02255 - {formation by thermal treatment
H01L21/31654 - {of semiconductor materials, e.g. the body itself}
H01L21/02238 - {silicon in uncombined form, i.e. pure silicon}
H01L21/31658 - {by thermal oxidation, e.g. of SiGe}

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DOE Contract Number:: AC36-83CH10093

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Sopori, Bhushan L. Application Of Optical Processing For Growth Of Silicon Dioxide.  United States: N. p., 1997. 
        Web.

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                    Sopori, Bhushan L. Application Of Optical Processing For Growth Of Silicon Dioxide.  United States.

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                    Sopori, Bhushan L. Tue .  
        "Application Of Optical Processing For Growth Of Silicon Dioxide".  United States.  https://www.osti.gov/servlets/purl/879324.

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@article{osti_879324,

  title        = {Application Of Optical Processing For Growth Of Silicon Dioxide},

  author       = {Sopori, Bhushan L},

  abstractNote = {A process for producing a silicon dioxide film on a surface of a silicon substrate. The process comprises illuminating a silicon substrate in a substantially pure oxygen atmosphere with a broad spectrum of visible and infrared light at an optical power density of from about 3 watts/cm.sup.2 to about 6 watts/cm.sup.2 for a time period sufficient to produce a silicon dioxide film on the surface of the silicon substrate. An optimum optical power density is about 4 watts/cm.sup.2 for growth of a 100.ANG.-300.ANG. film at a resultant temperature of about 400.degree. C. Deep level transient spectroscopy analysis detects no measurable impurities introduced into the silicon substrate during silicon oxide production and shows the interface state density at the SiO.sub.2 /Si interface to be very low.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1997},

  month        = {6}

}

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