Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets
Abstract
An improved method is disclosed for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite`s high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding. 11 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- OSTI Identifier:
- 87728
- Patent Number(s):
- 5428882
- Application Number:
- PAN: 8-042,704
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 4 Jul 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 66 PHYSICS; TARGETS; FABRICATION; SPUTTERING; PYROLYTIC CARBON; SERVICE LIFE; ENERGY TRANSFER
Citation Formats
Makowiecki, D M, Ramsey, P B, and Juntz, R S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets. United States: N. p., 1995.
Web.
Makowiecki, D M, Ramsey, P B, & Juntz, R S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets. United States.
Makowiecki, D M, Ramsey, P B, and Juntz, R S. Tue .
"Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets". United States.
@article{osti_87728,
title = {Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets},
author = {Makowiecki, D M and Ramsey, P B and Juntz, R S},
abstractNote = {An improved method is disclosed for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite`s high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding. 11 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {7}
}