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Title: Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

Abstract

An improved method is disclosed for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite`s high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding. 11 figs.

Inventors:
; ;
Issue Date:
Research Org.:
University of California
OSTI Identifier:
87728
Patent Number(s):
5,428,882
Application Number:
PAN: 8-042,704
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 4 Jul 1995
Country of Publication:
United States
Language:
English
Subject:
66 PHYSICS; TARGETS; FABRICATION; SPUTTERING; PYROLYTIC CARBON; SERVICE LIFE; ENERGY TRANSFER

Citation Formats

Makowiecki, D M, Ramsey, P B, and Juntz, R S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets. United States: N. p., 1995. Web.
Makowiecki, D M, Ramsey, P B, & Juntz, R S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets. United States.
Makowiecki, D M, Ramsey, P B, and Juntz, R S. Tue . "Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets". United States.
@article{osti_87728,
title = {Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets},
author = {Makowiecki, D M and Ramsey, P B and Juntz, R S},
abstractNote = {An improved method is disclosed for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite`s high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding. 11 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {7}
}