Surface-micromachined microfluidic devices

Galambos, Paul C; Okandan, Murat; Montague, Stephen; Smith, James H; Paul, Phillip H; Krygowski, Thomas W; Allen, James J; Nichols, Christopher A

Title: Surface-micromachined microfluidic devices

Abstract

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.

Inventors:

Galambos, Paul C ^[1]; Okandan, Murat ^[1]; Montague, Stephen ^[1]; Smith, James H ^[2]; Paul, Phillip H ^[3]; Krygowski, Thomas W ^[4]; Allen, James J ^[1]; Nichols, Christopher A ^[5]; Jakubczak, II, Jerome F. ^[6]

Albuquerque, NM
Redmond, WA
Livermore, CA
Cortlandt Manor, NY
Hauppauge, NY
(Rio Rancho, NM)

Issue Date:: 2003-01-01

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 875124

Patent Number(s):: 6537437

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE

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B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B01J19/0093 - {Microreactors, e.g. miniaturised or microfabricated reactors
B01J2219/00783 - Laminate assemblies, i.e. the reactor comprising a stack of plates
B01J2219/00828 - Silicon wafers or plates
B01J2219/00853 - Employing electrode arrangements

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2200/12 - Specific details about manufacturing devices
B01L2400/0418 - electro-osmotic flow [EOF]
B01L3/502707 - {characterised by the manufacture of the container or its components

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2030/0035 - {electrical field}
G01N2030/285 - {electrically driven carrier}
G01N2030/326 - {pumps}
G01N27/44773 - {Multi-stage electrophoresis, e.g. two-dimensional electrophoresis}
G01N27/44791 - {Microapparatus
G01N30/0005 - {Field flow fractionation}
G01N30/02 - Column chromatography
G01N30/6069 - {with compartments or bed substructure}
G01N30/6095 - {Micromachined or nanomachined, e.g. micro- or nanosize}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: surface-micromachined; microfluidic; devices; disclosed; manufactured; surface-micromachining; utilize; electroosmotic; force; electromagnetic; field; generate; flow; fluid; microchannel; lined; silicon; nitride; additional; electrodes; provided; separating; constituents; based; charge; magnetic; moment; pressurized; channel; applications; including; electrokinetic; pumping; chemical; biochemical; analysis; electrophoresis; chromatography; conducting; reactions; microscopic; scale; forming; hydraulic; actuators; magnetic field; silicon nitride; chemical reaction; chemical analysis; microfluidic devices; /204/

Citation Formats


                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Surface-micromachined microfluidic devices.  United States: N. p., 2003. 
        Web.

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                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, & Jakubczak, II, Jerome F. Surface-micromachined microfluidic devices.  United States.

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                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Wed .  
        "Surface-micromachined microfluidic devices".  United States.  https://www.osti.gov/servlets/purl/875124.

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@article{osti_875124,

  title        = {Surface-micromachined microfluidic devices},

  author       = {Galambos, Paul C and Okandan, Murat and Montague, Stephen and Smith, James H and Paul, Phillip H and Krygowski, Thomas W and Allen, James J and Nichols, Christopher A and Jakubczak, II, Jerome F.},

  abstractNote = {Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {1}

}

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Works referenced in this record:

Electrokinetic Generation of High Pressures using Porous Microstructures
book, January 1998

Paul, Phillip H.; Arnold, Don W.; Rakestraw, David J.
Micro Total Analysis Systems ’98
https://doi.org/10.1007/978-94-011-5286-0_11

The zeta potential of silicon nitride thin films
journal, March 1991

Bousse, Luc; Mostarshed, Shahriar
Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, Vol. 302, Issue 1-2
https://doi.org/10.1016/0022-0728(91)85046-R

An AC magnetohydrodynamic micropump
journal, May 2000

Lemoff, Asuncion V.; Lee, Abraham P.
Sensors and Actuators B: Chemical, Vol. 63, Issue 3
https://doi.org/10.1016/S0925-4005(00)00355-5

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Similar Records

Title: Surface-micromachined microfluidic devices

Abstract

Citation Formats

Electrokinetic Generation of High Pressures using Porous Microstructures book, January 1998

The zeta potential of silicon nitride thin films journal, March 1991

An AC magnetohydrodynamic micropump journal, May 2000

Electrokinetic Generation of High Pressures using Porous Microstructures
book, January 1998

The zeta potential of silicon nitride thin films
journal, March 1991

An AC magnetohydrodynamic micropump
journal, May 2000