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Title: Mitigation of radiation induced surface contamination

Abstract

A process for mitigating or eliminating contamination and/or degradation of surfaces having common, adventitious atmospheric contaminants adsorbed thereon and exposed to radiation. A gas or a mixture of gases is introduced into the environment of a surface(s) to be protected. The choice of the gaseous species to be introduced (typically a hydrocarbon gas, water vapor, or oxygen or mixtures thereof) is dependent upon the contaminant as well as the ability of the gaseous species to bind to the surface to be protected. When the surface and associated bound species are exposed to radiation reactive species are formed that react with surface contaminants such as carbon or oxide films to form volatile products (e.g., CO, CO.sub.2) which desorb from the surface.

Inventors:
 [1];  [2]
  1. (Dublin, CA)
  2. (Livermore, CA)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
875111
Patent Number(s):
6533952
Assignee:
EUV LLC (Santa Clara, CA) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
mitigation; radiation; induced; surface; contamination; process; mitigating; eliminating; andor; degradation; surfaces; common; adventitious; atmospheric; contaminants; adsorbed; exposed; gas; mixture; gases; introduced; environment; protected; choice; gaseous; species; typically; hydrocarbon; water; vapor; oxygen; mixtures; dependent; contaminant; ability; bind; associated; bound; reactive; formed; react; carbon; oxide; films; form; volatile; products; cosub2; desorb; water vapor; reactive species; radiation induced; /216/134/

Citation Formats

Klebanoff, Leonard E., and Stulen, Richard H. Mitigation of radiation induced surface contamination. United States: N. p., 2003. Web.
Klebanoff, Leonard E., & Stulen, Richard H. Mitigation of radiation induced surface contamination. United States.
Klebanoff, Leonard E., and Stulen, Richard H. Wed . "Mitigation of radiation induced surface contamination". United States. https://www.osti.gov/servlets/purl/875111.
@article{osti_875111,
title = {Mitigation of radiation induced surface contamination},
author = {Klebanoff, Leonard E. and Stulen, Richard H.},
abstractNote = {A process for mitigating or eliminating contamination and/or degradation of surfaces having common, adventitious atmospheric contaminants adsorbed thereon and exposed to radiation. A gas or a mixture of gases is introduced into the environment of a surface(s) to be protected. The choice of the gaseous species to be introduced (typically a hydrocarbon gas, water vapor, or oxygen or mixtures thereof) is dependent upon the contaminant as well as the ability of the gaseous species to bind to the surface to be protected. When the surface and associated bound species are exposed to radiation reactive species are formed that react with surface contaminants such as carbon or oxide films to form volatile products (e.g., CO, CO.sub.2) which desorb from the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

Patent:

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