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Title: Scanning evanescent electro-magnetic microscope

Abstract

A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

Inventors:
 [1];  [2];  [3];  [4]
  1. (Alameda, CA)
  2. (Anhui, CN)
  3. (La Jolla, CA)
  4. (Sunnyvale, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
875106
Patent Number(s):
6532806
Assignee:
The Regents of the University of California (Oakland, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
scanning; evanescent; electro-magnetic; microscope; novel; described; near-field; electromagnetic; waves; probe; sample; properties; capable; resolution; imaging; quantitative; measurements; electrical; inventive; wave; semm; map; dielectric; constant; tangent; loss; conductivity; complex; impedance; parameters; materials; corresponds; imaged; detail; measure; electrically; conducting; electrically conducting; electromagnetic wave; resolution imaging; quantitative measure; /73/

Citation Formats

Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G., and Wei, Tao. Scanning evanescent electro-magnetic microscope. United States: N. p., 2003. Web.
Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G., & Wei, Tao. Scanning evanescent electro-magnetic microscope. United States.
Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G., and Wei, Tao. Wed . "Scanning evanescent electro-magnetic microscope". United States. https://www.osti.gov/servlets/purl/875106.
@article{osti_875106,
title = {Scanning evanescent electro-magnetic microscope},
author = {Xiang, Xiao-Dong and Gao, Chen and Schultz, Peter G. and Wei, Tao},
abstractNote = {A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

Patent:

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