Scanning evanescent electro-magnetic microscope

Xiang, Xiao-Dong; Gao, Chen; Schultz, Peter G; Wei, Tao

Title: Scanning evanescent electro-magnetic microscope

Abstract

A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

Inventors:

Xiang, Xiao-Dong ^[1]; Gao, Chen ^[2]; Schultz, Peter G ^[3]; Wei, Tao ^[4]

Alameda, CA
Anhui, CN
La Jolla, CA
Sunnyvale, CA

Issue Date:: 2003-01-01

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

OSTI Identifier:: 875106

Patent Number(s):: 6532806

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y20/00 - Nanooptics, e.g. quantum optics or photonic crystals
B82Y35/00 - Methods or apparatus for measurement or analysis of nanostructures

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q60/22 - Probes, their manufacture, or their related instrumentation, e.g. holders

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/86 - Scanning probe structure
Y10S977/864 - Electrostatic force probe
Y10S977/865 - Magnetic force probe
Y10S977/869 - Optical microscope

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: scanning; evanescent; electro-magnetic; microscope; novel; described; near-field; electromagnetic; waves; probe; sample; properties; capable; resolution; imaging; quantitative; measurements; electrical; inventive; wave; semm; map; dielectric; constant; tangent; loss; conductivity; complex; impedance; parameters; materials; corresponds; imaged; detail; measure; electrically; conducting; electrically conducting; electromagnetic wave; resolution imaging; quantitative measure; /73/

Citation Formats


                    Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G, and Wei, Tao. Scanning evanescent electro-magnetic microscope.  United States: N. p., 2003. 
        Web.

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                    Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G, & Wei, Tao. Scanning evanescent electro-magnetic microscope.  United States.

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                    Xiang, Xiao-Dong, Gao, Chen, Schultz, Peter G, and Wei, Tao. Wed .  
        "Scanning evanescent electro-magnetic microscope".  United States.  https://www.osti.gov/servlets/purl/875106.

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@article{osti_875106,

  title        = {Scanning evanescent electro-magnetic microscope},

  author       = {Xiang, Xiao-Dong and Gao, Chen and Schultz, Peter G and Wei, Tao},

  abstractNote = {A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {1}

}

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Works referenced in this record:

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Optics Communications, Vol. 69, Issue 3-4
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Similar Records

Title: Scanning evanescent electro-magnetic microscope

Abstract

Citation Formats

Non-destructive characterization of materials by evanescent microwaves journal, May 1993

Scanning tip microwave near‐field microscope journal, June 1996

Quantitative microwave near-field microscopy of dielectric properties journal, November 1998

Near‐field scanning microwave microscope with 100 μm resolution journal, November 1996

Super-resolution Aperture Scanning Microscope journal, June 1972

Nondestructive Imaging of Dielectric-Constant Profiles and Ferroelectric Domains with a Scanning-Tip Microwave Near-Field Microscope journal, June 1997

Quantitative nonlinear dielectric microscopy of periodically polarized ferroelectric domains journal, August 1998

Use of a helical resonator as a capacitive transducer in vibrating reed measurements journal, September 1989

High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope journal, September 1997

Quantitative microwave evanescent microscopy journal, November 1999

Tip–sample distance feedback control in a scanning evanescent microwave microscope journal, May 1999

Microwave Scanning Microscopy for Planar Structure Diagnostics conference, January 1987

XXXVIII. A suggested method for extending microscopic resolution into the ultra-microscopic region journal, August 1928

A Microwave Magnetic Microscope journal, March 1962

Noncontact Technique for the Local Measurement of Semiconductor Resistivity journal, November 1965

Scanning electromagnetic transmission line microscope with sub-wavelength resolution journal, January 1989

Non-destructive characterization of materials by evanescent microwaves
journal, May 1993

Scanning tip microwave near‐field microscope
journal, June 1996

Quantitative microwave near-field microscopy of dielectric properties
journal, November 1998

Near‐field scanning microwave microscope with 100 μm resolution
journal, November 1996

Super-resolution Aperture Scanning Microscope
journal, June 1972

Nondestructive Imaging of Dielectric-Constant Profiles and Ferroelectric Domains with a Scanning-Tip Microwave Near-Field Microscope
journal, June 1997

Quantitative nonlinear dielectric microscopy of periodically polarized ferroelectric domains
journal, August 1998

Use of a helical resonator as a capacitive transducer in vibrating reed measurements
journal, September 1989

High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope
journal, September 1997

Quantitative microwave evanescent microscopy
journal, November 1999

Tip–sample distance feedback control in a scanning evanescent microwave microscope
journal, May 1999

Microwave Scanning Microscopy for Planar Structure Diagnostics
conference, January 1987

XXXVIII. A suggested method for extending microscopic resolution into the ultra-microscopic region
journal, August 1928

A Microwave Magnetic Microscope
journal, March 1962

Noncontact Technique for the Local Measurement of Semiconductor Resistivity
journal, November 1965

Scanning electromagnetic transmission line microscope with sub-wavelength resolution
journal, January 1989