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Title: Chemical preconcentrator with integral thermal flow sensor

Abstract

A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.

Inventors:
 [1];  [2]
  1. Albuquerque, NM
  2. Cedar Crest, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
875083
Patent Number(s):
6527835
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
chemical; preconcentrator; integral; thermal; flow; sensor; accurately; measure; fluid; rate; microanalytical; operated; constant; temperature; power; mode; variants; fabricated; mems; technology; microanlaytical; heat; capacity; low-loss; size; fast; efficient; battery-powered; portable; systems; fluid flow; flow rate; flow sensor; /96/55/73/

Citation Formats

Manginell, Ronald P, and Frye-Mason, Gregory C. Chemical preconcentrator with integral thermal flow sensor. United States: N. p., 2003. Web.
Manginell, Ronald P, & Frye-Mason, Gregory C. Chemical preconcentrator with integral thermal flow sensor. United States.
Manginell, Ronald P, and Frye-Mason, Gregory C. Wed . "Chemical preconcentrator with integral thermal flow sensor". United States. https://www.osti.gov/servlets/purl/875083.
@article{osti_875083,
title = {Chemical preconcentrator with integral thermal flow sensor},
author = {Manginell, Ronald P and Frye-Mason, Gregory C},
abstractNote = {A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

Patent:

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Works referenced in this record:

Integrated smart two-dimensional thermal flow sensor with Seebeck-voltage-to-frequency conversion
journal, March 1992

  • Bosman, J. W.; De Bruijn, J. M.; Riedijk, F. R.
  • Sensors and Actuators A: Physical, Vol. 31, Issue 1-3, p. 9-16
  • DOI: 10.1016/0924-4247(92)80073-C

A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
journal, June 1993