Integrated optical interrogation of micro-structures
Abstract
The invention is an integrated optical sensing element for detecting and measuring changes in position or deflection. A deflectable member, such as a microcantilever, is configured to receive a light beam. A waveguide, such as an optical waveguide or an optical fiber, is positioned to redirect light towards the deflectable member. The waveguide can be incorporated into the deflectable member or disposed adjacent to the deflectable member. Means for measuring the extent of position change or deflection of the deflectable member by receiving the light beam from the deflectable member, such as a photodetector or interferometer, receives the reflected light beam from the deflectable member. Changes in the light beam are correlated to the changes in position or deflection of the deflectable member. A plurality of deflectable members can be arranged in a matrix or an array to provide one or two-dimensional imaging or sensing capabilities.
- Inventors:
-
- (Oak Ridge, TN)
- Knoxville, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 875076
- Patent Number(s):
- 6525307
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- AC05-96OR22464
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- integrated; optical; interrogation; micro-structures; sensing; element; detecting; measuring; changes; position; deflection; deflectable; microcantilever; configured; receive; light; beam; waveguide; fiber; positioned; redirect; towards; incorporated; disposed; adjacent; means; extent; change; receiving; photodetector; interferometer; receives; reflected; correlated; plurality; arranged; matrix; array; provide; two-dimensional; imaging; capabilities; optical fiber; light beam; sensing element; integrated optical; optical sensing; measuring changes; /250/356/
Citation Formats
Evans, III, Boyd M., Datskos, Panagiotis G, and Rajic, Slobodan. Integrated optical interrogation of micro-structures. United States: N. p., 2003.
Web.
Evans, III, Boyd M., Datskos, Panagiotis G, & Rajic, Slobodan. Integrated optical interrogation of micro-structures. United States.
Evans, III, Boyd M., Datskos, Panagiotis G, and Rajic, Slobodan. Wed .
"Integrated optical interrogation of micro-structures". United States. https://www.osti.gov/servlets/purl/875076.
@article{osti_875076,
title = {Integrated optical interrogation of micro-structures},
author = {Evans, III, Boyd M. and Datskos, Panagiotis G and Rajic, Slobodan},
abstractNote = {The invention is an integrated optical sensing element for detecting and measuring changes in position or deflection. A deflectable member, such as a microcantilever, is configured to receive a light beam. A waveguide, such as an optical waveguide or an optical fiber, is positioned to redirect light towards the deflectable member. The waveguide can be incorporated into the deflectable member or disposed adjacent to the deflectable member. Means for measuring the extent of position change or deflection of the deflectable member by receiving the light beam from the deflectable member, such as a photodetector or interferometer, receives the reflected light beam from the deflectable member. Changes in the light beam are correlated to the changes in position or deflection of the deflectable member. A plurality of deflectable members can be arranged in a matrix or an array to provide one or two-dimensional imaging or sensing capabilities.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}
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