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Title: Ion beam collimating grid to reduce added defects

Abstract

A collimating grid for an ion source located after the exit grid. The collimating grid collimates the ion beamlets and disallows beam spread and limits the beam divergence during transients and steady state operation. The additional exit or collimating grid prevents beam divergence during turn-on and turn-off and prevents ions from hitting the periphery of the target where there is re-deposited material or from missing the target and hitting the wall of the vessel where there is deposited material, thereby preventing defects from being deposited on a substrate to be coated. Thus, the addition of a collimating grid to an ion source ensures that the ion beam will hit and be confined to a specific target area.

Inventors:
 [1];  [2]
  1. (Oakland, CA)
  2. (Livermore, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
875062
Patent Number(s):
6521897
Assignee:
The Regents of the University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
beam; collimating; grid; reduce; added; defects; source; located; exit; collimates; beamlets; disallows; spread; limits; divergence; transients; steady; operation; additional; prevents; turn-on; turn-off; hitting; periphery; target; re-deposited; material; missing; wall; vessel; deposited; preventing; substrate; coated; addition; ensures; hit; confined; specific; beam divergence; /250/204/

Citation Formats

Lindquist, Walter B., and Kearney, Patrick A. Ion beam collimating grid to reduce added defects. United States: N. p., 2003. Web.
Lindquist, Walter B., & Kearney, Patrick A. Ion beam collimating grid to reduce added defects. United States.
Lindquist, Walter B., and Kearney, Patrick A. Wed . "Ion beam collimating grid to reduce added defects". United States. https://www.osti.gov/servlets/purl/875062.
@article{osti_875062,
title = {Ion beam collimating grid to reduce added defects},
author = {Lindquist, Walter B. and Kearney, Patrick A.},
abstractNote = {A collimating grid for an ion source located after the exit grid. The collimating grid collimates the ion beamlets and disallows beam spread and limits the beam divergence during transients and steady state operation. The additional exit or collimating grid prevents beam divergence during turn-on and turn-off and prevents ions from hitting the periphery of the target where there is re-deposited material or from missing the target and hitting the wall of the vessel where there is deposited material, thereby preventing defects from being deposited on a substrate to be coated. Thus, the addition of a collimating grid to an ion source ensures that the ion beam will hit and be confined to a specific target area.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

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