Ion beam collimating grid to reduce added defects
Abstract
A collimating grid for an ion source located after the exit grid. The collimating grid collimates the ion beamlets and disallows beam spread and limits the beam divergence during transients and steady state operation. The additional exit or collimating grid prevents beam divergence during turn-on and turn-off and prevents ions from hitting the periphery of the target where there is re-deposited material or from missing the target and hitting the wall of the vessel where there is deposited material, thereby preventing defects from being deposited on a substrate to be coated. Thus, the addition of a collimating grid to an ion source ensures that the ion beam will hit and be confined to a specific target area.
- Inventors:
-
- Oakland, CA
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 875062
- Patent Number(s):
- 6521897
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- beam; collimating; grid; reduce; added; defects; source; located; exit; collimates; beamlets; disallows; spread; limits; divergence; transients; steady; operation; additional; prevents; turn-on; turn-off; hitting; periphery; target; re-deposited; material; missing; wall; vessel; deposited; preventing; substrate; coated; addition; ensures; hit; confined; specific; beam divergence; /250/204/
Citation Formats
Lindquist, Walter B, and Kearney, Patrick A. Ion beam collimating grid to reduce added defects. United States: N. p., 2003.
Web.
Lindquist, Walter B, & Kearney, Patrick A. Ion beam collimating grid to reduce added defects. United States.
Lindquist, Walter B, and Kearney, Patrick A. Wed .
"Ion beam collimating grid to reduce added defects". United States. https://www.osti.gov/servlets/purl/875062.
@article{osti_875062,
title = {Ion beam collimating grid to reduce added defects},
author = {Lindquist, Walter B and Kearney, Patrick A},
abstractNote = {A collimating grid for an ion source located after the exit grid. The collimating grid collimates the ion beamlets and disallows beam spread and limits the beam divergence during transients and steady state operation. The additional exit or collimating grid prevents beam divergence during turn-on and turn-off and prevents ions from hitting the periphery of the target where there is re-deposited material or from missing the target and hitting the wall of the vessel where there is deposited material, thereby preventing defects from being deposited on a substrate to be coated. Thus, the addition of a collimating grid to an ion source ensures that the ion beam will hit and be confined to a specific target area.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}
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