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Title: Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

Abstract

A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874992
Patent Number(s):
6507138
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
compact; high-stability; electrostatic; actuator; featuring; contact-free; self-limiting; displacement; disclosed; microelectromechanical; applications; utilizes; stationary; moveable; electrodes; formed; substrate; supported; frame; provides; rigid; structure; allows; operated; voltages; 190; volts; provide; actuation; force; compared; conventional; comb; actuators; larger; size; operation; maximum; insensitive; exact; value; applied; voltage; applied voltage; /310/

Citation Formats

Rodgers, M Steven, and Miller, Samuel L. Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement. United States: N. p., 2003. Web.
Rodgers, M Steven, & Miller, Samuel L. Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement. United States.
Rodgers, M Steven, and Miller, Samuel L. Wed . "Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement". United States. https://www.osti.gov/servlets/purl/874992.
@article{osti_874992,
title = {Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement},
author = {Rodgers, M Steven and Miller, Samuel L},
abstractNote = {A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

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Works referenced in this record:

Comb-drive actuators for large displacements
journal, September 1996

  • Legtenberg, Rob; Groeneveld, A. W.; Elwenspoek, M.
  • Journal of Micromechanics and Microengineering, Vol. 6, Issue 3
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Laterally Driven Polysilicon Resonant Microstructures
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Design, fabrication, and operation of submicron gap comb-drive microactuators
journal, March 1992

  • Hirano, T.; Furuhata, T.; Gabriel, K. J.
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Comb actuators for xy-microstages
journal, September 1993