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Title: Micro-machined thermo-conductivity detector

Abstract

A micro-machined thermal conductivity detector for a portable gas chromatograph. The detector is highly sensitive and has fast response time to enable detection of the small size gas samples in a portable gas chromatograph which are in the order of nanoliters. The high sensitivity and fast response time are achieved through micro-machined devices composed of a nickel wire, for example, on a silicon nitride window formed in a silicon member and about a millimeter square in size. In addition to operating as a thermal conductivity detector, the silicon nitride window with a micro-machined wire therein of the device can be utilized for a fast response heater for PCR applications.

Inventors:
 [1]
  1. (Antioch, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
874973
Patent Number(s):
6502983
Assignee:
The Regents of the University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
micro-machined; thermo-conductivity; detector; thermal; conductivity; portable; gas; chromatograph; highly; sensitive; fast; response; time; enable; detection; size; samples; nanoliters; sensitivity; achieved; devices; composed; nickel; wire; example; silicon; nitride; window; formed; millimeter; square; addition; operating; device; utilized; heater; pcr; applications; thermal conductivity; silicon nitride; gas sample; fast response; /374/

Citation Formats

Yu, Conrad. Micro-machined thermo-conductivity detector. United States: N. p., 2003. Web.
Yu, Conrad. Micro-machined thermo-conductivity detector. United States.
Yu, Conrad. Wed . "Micro-machined thermo-conductivity detector". United States. https://www.osti.gov/servlets/purl/874973.
@article{osti_874973,
title = {Micro-machined thermo-conductivity detector},
author = {Yu, Conrad},
abstractNote = {A micro-machined thermal conductivity detector for a portable gas chromatograph. The detector is highly sensitive and has fast response time to enable detection of the small size gas samples in a portable gas chromatograph which are in the order of nanoliters. The high sensitivity and fast response time are achieved through micro-machined devices composed of a nickel wire, for example, on a silicon nitride window formed in a silicon member and about a millimeter square in size. In addition to operating as a thermal conductivity detector, the silicon nitride window with a micro-machined wire therein of the device can be utilized for a fast response heater for PCR applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {1}
}

Patent:

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