Title: Method of forming fluorine-bearing diamond layer on substrates, including tool substrates

Abstract

A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.

Inventors:

Chang, R P. H. ^[1]; Grannen, Kevin J ^[2]

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1. Glenview, IL
2. Evanston, IL

Issue Date:

2002-01-01

Research Org.:

Argonne National Laboratory (ANL), Argonne, IL (United States)

OSTI Identifier:

874969

Patent Number(s):

6500488

Assignee:

Northwestern Univ. (Evanston, IL)

Patent Classifications (CPCs):

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C16/274 - {using microwave discharges}
C23C16/278 - {doping or introduction of a secondary phase in the diamond}

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DOE Contract Number:  

FG02-87ER45314

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

method; forming; fluorine-bearing; diamond; layer; substrates; including; tool; non-diamond; especially; comprising; metal; matrix; hard; particles; tungsten; carbide; substrate; plasma; gas; contacted; temperature; pressure; conditions; effective; nucleate; insert; treated; prior; nucleation; growth; operation; etching; etchants; pressure conditions; /51/423/427/