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Title: Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy

Abstract

Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.

Inventors:
 [1];  [2];  [3];  [1];  [1];  [1];  [3];  [4];  [3]
  1. Knoxville, TN
  2. Farragut, TN
  3. Oak Ridge, TN
  4. Clinton, TN
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
874963
Patent Number(s):
6498349
Application Number:
09/368,919
Assignee:
UT-Battelle (Oakridge, TN)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
electrostatically; focused; addressable; field; emission; array; chips; afeas; high-speed; massively; parallel; maskless; digital; e-beam; direct; write; lithography; scanning; electron; microscopy; systems; methods; described; afea; method; operating; field-emission; generating; plurality; beams; pluralitly; emitters; compose; focusing; on-chip; electrostatic; stack; provide; advantages; including; avoidance; space-charge; blow-up; electron beam; field emission; methods provide; scanning electron; massively parallel; electron microscopy; /250/

Citation Formats

Thomas, Clarence E, Baylor, Larry R, Voelkl, Edgar, Simpson, Michael L, Paulus, Michael J, Lowndes, Douglas H, Whealton, John H, Whitson, John C, and Wilgen, John B. Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy. United States: N. p., 2002. Web.
Thomas, Clarence E, Baylor, Larry R, Voelkl, Edgar, Simpson, Michael L, Paulus, Michael J, Lowndes, Douglas H, Whealton, John H, Whitson, John C, & Wilgen, John B. Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy. United States.
Thomas, Clarence E, Baylor, Larry R, Voelkl, Edgar, Simpson, Michael L, Paulus, Michael J, Lowndes, Douglas H, Whealton, John H, Whitson, John C, and Wilgen, John B. Tue . "Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy". United States. https://www.osti.gov/servlets/purl/874963.
@article{osti_874963,
title = {Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy},
author = {Thomas, Clarence E and Baylor, Larry R and Voelkl, Edgar and Simpson, Michael L and Paulus, Michael J and Lowndes, Douglas H and Whealton, John H and Whitson, John C and Wilgen, John B},
abstractNote = {Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 24 00:00:00 EST 2002},
month = {Tue Dec 24 00:00:00 EST 2002}
}

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