Process and apparatus for making oriented crystal layers
Abstract
Thin films of single crystal-like materials are made by using flow-through ion beam deposition during specific substrate rotation around an axis in a clocking action. The substrate is quickly rotated to a selected deposition position, paused in the deposition position for ionized material to be deposited, then quickly rotated to the next selected deposition position. The clocking motion can be achieved by use of a lobed cam on the spindle with which the substrate is rotated or by stopping and starting a stepper motor at long and short intervals. Other symmetries can be programmed into the process, allowing virtually any oriented inorganic crystal to be grown on the substrate surface.
- Inventors:
-
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 874895
- Patent Number(s):
- 6485565
- Assignee:
- The Regents of the University of California (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- process; apparatus; oriented; crystal; layers; films; single; crystal-like; materials; flow-through; beam; deposition; specific; substrate; rotation; axis; clocking; action; quickly; rotated; selected; position; paused; ionized; material; deposited; motion; achieved; lobed; spindle; stopping; starting; stepper; motor; intervals; symmetries; programmed; allowing; virtually; inorganic; grown; surface; single crystal; substrate surface; stepper motor; beam deposition; /117/118/204/
Citation Formats
Springer, Robert W. Process and apparatus for making oriented crystal layers. United States: N. p., 2002.
Web.
Springer, Robert W. Process and apparatus for making oriented crystal layers. United States.
Springer, Robert W. Tue .
"Process and apparatus for making oriented crystal layers". United States. https://www.osti.gov/servlets/purl/874895.
@article{osti_874895,
title = {Process and apparatus for making oriented crystal layers},
author = {Springer, Robert W},
abstractNote = {Thin films of single crystal-like materials are made by using flow-through ion beam deposition during specific substrate rotation around an axis in a clocking action. The substrate is quickly rotated to a selected deposition position, paused in the deposition position for ionized material to be deposited, then quickly rotated to the next selected deposition position. The clocking motion can be achieved by use of a lobed cam on the spindle with which the substrate is rotated or by stopping and starting a stepper motor at long and short intervals. Other symmetries can be programmed into the process, allowing virtually any oriented inorganic crystal to be grown on the substrate surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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