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Title: Process and apparatus for making oriented crystal layers

Abstract

Thin films of single crystal-like materials are made by using flow-through ion beam deposition during specific substrate rotation around an axis in a clocking action. The substrate is quickly rotated to a selected deposition position, paused in the deposition position for ionized material to be deposited, then quickly rotated to the next selected deposition position. The clocking motion can be achieved by use of a lobed cam on the spindle with which the substrate is rotated or by stopping and starting a stepper motor at long and short intervals. Other symmetries can be programmed into the process, allowing virtually any oriented inorganic crystal to be grown on the substrate surface.

Inventors:
 [1]
  1. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
874895
Patent Number(s):
6485565
Assignee:
The Regents of the University of California (Los Alamos, NM)
Patent Classifications (CPCs):
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
process; apparatus; oriented; crystal; layers; films; single; crystal-like; materials; flow-through; beam; deposition; specific; substrate; rotation; axis; clocking; action; quickly; rotated; selected; position; paused; ionized; material; deposited; motion; achieved; lobed; spindle; stopping; starting; stepper; motor; intervals; symmetries; programmed; allowing; virtually; inorganic; grown; surface; single crystal; substrate surface; stepper motor; beam deposition; /117/118/204/

Citation Formats

Springer, Robert W. Process and apparatus for making oriented crystal layers. United States: N. p., 2002. Web.
Springer, Robert W. Process and apparatus for making oriented crystal layers. United States.
Springer, Robert W. Tue . "Process and apparatus for making oriented crystal layers". United States. https://www.osti.gov/servlets/purl/874895.
@article{osti_874895,
title = {Process and apparatus for making oriented crystal layers},
author = {Springer, Robert W},
abstractNote = {Thin films of single crystal-like materials are made by using flow-through ion beam deposition during specific substrate rotation around an axis in a clocking action. The substrate is quickly rotated to a selected deposition position, paused in the deposition position for ionized material to be deposited, then quickly rotated to the next selected deposition position. The clocking motion can be achieved by use of a lobed cam on the spindle with which the substrate is rotated or by stopping and starting a stepper motor at long and short intervals. Other symmetries can be programmed into the process, allowing virtually any oriented inorganic crystal to be grown on the substrate surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

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