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Title: Multi-axis planar slide system

Abstract

An apparatus for positioning an item that provides two-dimensional, independent orthogonal motion of a platform in a X-Y plane. A pair of master and slave disks engages opposite sides of the platform. Rotational drivers are connected to master disks so the disks rotate eccentrically about axes of rotation. Opposing slave disks are connected to master disks on opposite sides of the platform by a timing belt, or are electronically synchronized together using stepper motors, to effect coordinated motion. The coordinated eccentric motion of the pairs of master/slave disks compels smooth linear motion of the platform in the X-Y plane without backlash. The apparatus can be a planar mechanism implemented in a MEMS device.

Inventors:
 [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874798
Patent Number(s):
6463664
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multi-axis; planar; slide; apparatus; positioning; item; provides; two-dimensional; independent; orthogonal; motion; platform; x-y; plane; pair; master; slave; disks; engages; opposite; rotational; drivers; connected; rotate; eccentrically; axes; rotation; opposing; timing; belt; electronically; synchronized; stepper; motors; effect; coordinated; eccentric; pairs; masterslave; compels; smooth; linear; backlash; mechanism; implemented; mems; device; mems device; /33/

Citation Formats

Bieg, Lothar F. Multi-axis planar slide system. United States: N. p., 2002. Web.
Bieg, Lothar F. Multi-axis planar slide system. United States.
Bieg, Lothar F. Tue . "Multi-axis planar slide system". United States. https://www.osti.gov/servlets/purl/874798.
@article{osti_874798,
title = {Multi-axis planar slide system},
author = {Bieg, Lothar F},
abstractNote = {An apparatus for positioning an item that provides two-dimensional, independent orthogonal motion of a platform in a X-Y plane. A pair of master and slave disks engages opposite sides of the platform. Rotational drivers are connected to master disks so the disks rotate eccentrically about axes of rotation. Opposing slave disks are connected to master disks on opposite sides of the platform by a timing belt, or are electronically synchronized together using stepper motors, to effect coordinated motion. The coordinated eccentric motion of the pairs of master/slave disks compels smooth linear motion of the platform in the X-Y plane without backlash. The apparatus can be a planar mechanism implemented in a MEMS device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

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