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Title: Cantilevered multilevel LIGA devices and methods

Abstract

In the formation of multilevel LIGA microstructures, a preformed sheet of photoresist material, such as polymethylmethacrylate (PMMA) is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the exposed photoresist material. A first microstructure is then formed by electroplating metal into the areas from which the photoresist has been removed. Additional levels of microstructure are added to the initial microstructure by covering the first microstructure with a conductive polymer, machining the conductive polymer layer to reveal the surface of the first microstructure, sealing the conductive polymer and surface of the first microstructure with a metal layer, and then forming the second level of structure on top of the first level structure. In such a manner, multiple layers of microstructure can be built up to allow complex cantilevered microstructures to be formed.

Inventors:
 [1];  [2]
  1. Pleasanton, CA
  2. Danville, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874775
Patent Number(s):
6458263
Assignee:
Sandia National Laboratories (Livermore, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
cantilevered; multilevel; liga; devices; methods; formation; microstructures; preformed; sheet; photoresist; material; polymethylmethacrylate; pmma; patterned; exposure; mask; radiation; x-rays; developed; developer; remove; exposed; microstructure; formed; electroplating; metal; removed; additional; levels; added; initial; covering; conductive; polymer; machining; layer; reveal; surface; sealing; forming; level; structure; top; manner; multiple; layers; built; allow; complex; metal layer; conductive polymer; resist material; photoresist material; /205/430/

Citation Formats

Morales, Alfredo Martin, and Domeier, Linda A. Cantilevered multilevel LIGA devices and methods. United States: N. p., 2002. Web.
Morales, Alfredo Martin, & Domeier, Linda A. Cantilevered multilevel LIGA devices and methods. United States.
Morales, Alfredo Martin, and Domeier, Linda A. Tue . "Cantilevered multilevel LIGA devices and methods". United States. https://www.osti.gov/servlets/purl/874775.
@article{osti_874775,
title = {Cantilevered multilevel LIGA devices and methods},
author = {Morales, Alfredo Martin and Domeier, Linda A},
abstractNote = {In the formation of multilevel LIGA microstructures, a preformed sheet of photoresist material, such as polymethylmethacrylate (PMMA) is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the exposed photoresist material. A first microstructure is then formed by electroplating metal into the areas from which the photoresist has been removed. Additional levels of microstructure are added to the initial microstructure by covering the first microstructure with a conductive polymer, machining the conductive polymer layer to reveal the surface of the first microstructure, sealing the conductive polymer and surface of the first microstructure with a metal layer, and then forming the second level of structure on top of the first level structure. In such a manner, multiple layers of microstructure can be built up to allow complex cantilevered microstructures to be formed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

Various replication techniques for manufacturing three-dimensional metal microstructures
journal, December 1997


Molding of three dimensional microstructures by the LIGA process
conference, January 1992


Molding of LIGA microstructures from fluorinated polymers
journal, October 1996