Miniature quadrupole mass spectrometer having a cold cathode ionization source

Felter, Thomas E

Title: Miniature quadrupole mass spectrometer having a cold cathode ionization source

Abstract

An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally "cracking" delicate analyte molecules, outgassing a "hot" filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.

Inventors:

Felter, Thomas E ^[1]

Livermore, CA

Issue Date:: 2002-01-01

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 874739

Patent Number(s):: 6452167

Assignee:: Sandia National Laboratories (Livermore, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2201/30407 - Microengineered point emitters
H01J49/4215 - {Quadrupole mass filters
H01J49/08 - Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
H01J1/3042 - {microengineered, e.g. Spindt-type}
H01J49/147 - {with electrons, e.g. electron impact ionisation, electron attachment

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: miniature; quadrupole; mass; spectrometer; cold; cathode; ionization; source; improved; described; improvement; lies; substitution; conventional; hot; filament; electron; field; emitter; array; allows; operating; qms; internal; pressures; currently; achievable; eliminating; thermally; cracking; delicate; analyte; molecules; outgassing; power; requirements; contamination; outgas; species; spurious; fields; avoid; addition; ability; produce; feas; well-known; developed; photolithographic; techniques; permits; building; multiple; redundancies; additional; cost; mass spectrometer; hot filament; ionization source; quadrupole mass; /250/

Citation Formats


                    Felter, Thomas E. Miniature quadrupole mass spectrometer having a cold cathode ionization source.  United States: N. p., 2002. 
        Web.

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                    Felter, Thomas E. Miniature quadrupole mass spectrometer having a cold cathode ionization source.  United States.

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                    Felter, Thomas E. Tue .  
        "Miniature quadrupole mass spectrometer having a cold cathode ionization source".  United States.  https://www.osti.gov/servlets/purl/874739.

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@article{osti_874739,

  title        = {Miniature quadrupole mass spectrometer having a cold cathode ionization source},

  author       = {Felter, Thomas E},

  abstractNote = {An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally "cracking" delicate analyte molecules, outgassing a "hot" filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2002},

  month        = {1}

}

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Works referenced in this record:

High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10 ⁻⁹ to 10 ⁻² Torr
journal, May 1996

Ferran, R. J.; Boumsellek, S.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 3
https://doi.org/10.1116/1.579938

The Mass Filter: Design and Performance
book, January 1976

Austin, W. E.; Holme, A. E.; Leck, J. H.
Quadrupole Mass Spectrometry and its Applications, p. 121-152
https://doi.org/10.1016/B978-0-444-41345-1.50011-3

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Title: Miniature quadrupole mass spectrometer having a cold cathode ionization source

Abstract

Citation Formats

High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10 −9 to 10 −2 Torr journal, May 1996

The Mass Filter: Design and Performance book, January 1976

High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10 ⁻⁹ to 10 ⁻² Torr
journal, May 1996

The Mass Filter: Design and Performance
book, January 1976