Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor
Abstract
A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.
- Inventors:
-
- Knoxville, TN
- Oak Ridge, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 874706
- Patent Number(s):
- 6444972
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04N - PICTORIAL COMMUNICATION, e.g. TELEVISION
- DOE Contract Number:
- AC05-96OR22464
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; method; detecting; electromagnetic; radiation; electron; photoemission; micromechanical; sensor; involve; producing; photoelectrons; metal; surface; contact; semiconductor; extracted; causes; photo-induced; bending; resulting; measured; signal; generated; processed; plurality; individual; sensors; arranged; two-dimensional; matrix; imaging; applications; electromagnetic radiation; metal surface; mechanical sensor; /250/73/
Citation Formats
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States: N. p., 2002.
Web.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, & Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Tue .
"Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor". United States. https://www.osti.gov/servlets/purl/874706.
@article{osti_874706,
title = {Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor},
author = {Datskos, Panagiotis G and Rajic, Slobodan and Datskou, Irene C and Egert, Charles M},
abstractNote = {A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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Works referenced in this record:
Photoinduced and thermal stress in silicon microcantilevers
journal, October 1998
- Datskos, Panos G.; Rajic, Slobodan; Datskou, Irene
- Applied Physics Letters, Vol. 73, Issue 16
Remote infrared radiation detection using piezoresistive microcantilevers
journal, November 1996
- Datskos, P. G.; Oden, P. I.; Thundat, T.
- Applied Physics Letters, Vol. 69, Issue 20
Detection of infrared photons using the electronic stress in metal–semiconductor cantilever interfaces
journal, February 2000
- Datskos, P. G.; Rajic, S.; Datskou, I.
- Ultramicroscopy, Vol. 82, Issue 1-4