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Title: Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor

Abstract

A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.

Inventors:
 [1];  [1];  [1];  [2]
  1. Knoxville, TN
  2. Oak Ridge, TN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
874706
Patent Number(s):
6444972
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04N - PICTORIAL COMMUNICATION, e.g. TELEVISION
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; method; detecting; electromagnetic; radiation; electron; photoemission; micromechanical; sensor; involve; producing; photoelectrons; metal; surface; contact; semiconductor; extracted; causes; photo-induced; bending; resulting; measured; signal; generated; processed; plurality; individual; sensors; arranged; two-dimensional; matrix; imaging; applications; electromagnetic radiation; metal surface; mechanical sensor; /250/73/

Citation Formats

Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States: N. p., 2002. Web.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, & Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Tue . "Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor". United States. https://www.osti.gov/servlets/purl/874706.
@article{osti_874706,
title = {Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor},
author = {Datskos, Panagiotis G and Rajic, Slobodan and Datskou, Irene C and Egert, Charles M},
abstractNote = {A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

Photoinduced and thermal stress in silicon microcantilevers
journal, October 1998


Remote infrared radiation detection using piezoresistive microcantilevers
journal, November 1996