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Title: Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor

Abstract

A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.

Inventors:
 [1];  [1];  [1];  [2]
  1. Knoxville, TN
  2. Oak Ridge, TN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
874706
Patent Number(s):
6444972
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04N - PICTORIAL COMMUNICATION, e.g. TELEVISION
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; method; detecting; electromagnetic; radiation; electron; photoemission; micromechanical; sensor; involve; producing; photoelectrons; metal; surface; contact; semiconductor; extracted; causes; photo-induced; bending; resulting; measured; signal; generated; processed; plurality; individual; sensors; arranged; two-dimensional; matrix; imaging; applications; electromagnetic radiation; metal surface; mechanical sensor; /250/73/

Citation Formats

Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States: N. p., 2002. Web.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, & Egert, Charles M. Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor. United States.
Datskos, Panagiotis G, Rajic, Slobodan, Datskou, Irene C, and Egert, Charles M. Tue . "Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor". United States. https://www.osti.gov/servlets/purl/874706.
@article{osti_874706,
title = {Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor},
author = {Datskos, Panagiotis G and Rajic, Slobodan and Datskou, Irene C and Egert, Charles M},
abstractNote = {A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Works referenced in this record:

Photoinduced and thermal stress in silicon microcantilevers
journal, October 1998


Remote infrared radiation detection using piezoresistive microcantilevers
journal, November 1996


Detection of infrared photons using the electronic stress in metal–semiconductor cantilever interfaces
journal, February 2000