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Title: Electrostatic apparatus for measurement of microfracture strength

Abstract

A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.

Inventors:
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Ann Arbor, MI
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874616
Patent Number(s):
6424165
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
electrostatic; apparatus; measurement; microfracture; strength; materials; testing; invented; suited; fracture; fatigue; properties; extremely; strong; encountered; microelectromechanical; systems; material; strains; excess; applied; pseudostatically; dynamically; repetitively; testers; practical; methods; determine; routinely; process; environment; alternatives; circumstances; particularly suited; fracture strength; testing apparatus; /324/73/310/

Citation Formats

de Boer, Maarten, Bitsie, Fernando, and Jensen, Brian D. Electrostatic apparatus for measurement of microfracture strength. United States: N. p., 2002. Web.
de Boer, Maarten, Bitsie, Fernando, & Jensen, Brian D. Electrostatic apparatus for measurement of microfracture strength. United States.
de Boer, Maarten, Bitsie, Fernando, and Jensen, Brian D. Tue . "Electrostatic apparatus for measurement of microfracture strength". United States. https://www.osti.gov/servlets/purl/874616.
@article{osti_874616,
title = {Electrostatic apparatus for measurement of microfracture strength},
author = {de Boer, Maarten and Bitsie, Fernando and Jensen, Brian D},
abstractNote = {A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

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