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Title: Apparatus and processes for the mass production of photovotaic modules

Abstract

An apparatus and processes for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl.sub.2 treatment, and ohmic contact formation, are performed within a single vacuum boundary at modest vacuum pressures. A p+ ohmic contact region is formed by subliming a metal salt onto the CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. The vacuum process apparatus facilitates selective heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto a substrate, and stripping thin films from a substrate. A substrate transport apparatus permits the movement of substrates into and out of vacuum during the thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.

Inventors:
 [1];  [2];  [3]
  1. 1205 W. Elizabeth #E164, Fort Collins, CO 80521
  2. 112 Rutgers #203, Fort Collins, CO 80525
  3. 1612 Faraday Cir., Fort Collins, CO 80525
Issue Date:
OSTI Identifier:
874613
Patent Number(s):
6423565
Application Number:
09/583,381
Assignee:
Barth; Kurt L. (1205 W. Elizabeth #E164, Fort Collins, CO 80521); Enzenroth; Robert A. (112 Rutgers #203, Fort Collins, CO 80525); Sampath; Walajabad S. (1612 Faraday Cir., Fort Collins, CO 80525)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; processes; massproduction; photovotaic; modules; scale; inline; manufacturing; cdte; photovoltaic; steps; including; rapid; substrate; heating; deposition; cds; cdclsub2; treatment; ohmic; contact; formation; performed; single; vacuum; boundary; modest; pressures; region; formed; subliming; metal; salt; layer; electrode; cost; spray; process; module; scribing; means; abrasive; blasting; mechanical; brushing; mask; facilitates; selective; substrates; films; exposure; vapor; minimal; leakage; stripping; transport; permits; movement; film; preventing; collection; coatings; metal salt; deposition processes; /438/136/

Citation Formats

Barth, Kurt L, Enzenroth, Robert A, and Sampath, Walajabad S. Apparatus and processes for the mass production of photovotaic modules. United States: N. p., 2002. Web.
Barth, Kurt L, Enzenroth, Robert A, & Sampath, Walajabad S. Apparatus and processes for the mass production of photovotaic modules. United States.
Barth, Kurt L, Enzenroth, Robert A, and Sampath, Walajabad S. Tue . "Apparatus and processes for the mass production of photovotaic modules". United States. https://www.osti.gov/servlets/purl/874613.
@article{osti_874613,
title = {Apparatus and processes for the mass production of photovotaic modules},
author = {Barth, Kurt L and Enzenroth, Robert A and Sampath, Walajabad S},
abstractNote = {An apparatus and processes for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl.sub.2 treatment, and ohmic contact formation, are performed within a single vacuum boundary at modest vacuum pressures. A p+ ohmic contact region is formed by subliming a metal salt onto the CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. The vacuum process apparatus facilitates selective heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto a substrate, and stripping thin films from a substrate. A substrate transport apparatus permits the movement of substrates into and out of vacuum during the thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {7}
}

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Works referenced in this record:

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