Flat panel display using Ti-Cr-Al-O thin film

Jankowski, Alan F; Schmid, Anthony P

Title: Flat panel display using Ti-Cr-Al-O thin film

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Abstract

Thin films of Ti--Cr--Al--O are used as a resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O.sub.2. Resistivity values from 10.sup.4 to 10.sup.10 Ohm-cm have been measured for Ti--Cr--Al--O film <1 .mu.m thick. The film resistivity can be discretely selected through control of the target composition and the deposition parameters. The application of Ti--Cr--Al--O as a thin film resistor has been found to be thermodynamically stable, unlike other metal-oxide films. The Ti--Cr--Al--O film can be used as a vertical or lateral resistor, for example, as a layer beneath a field emission cathode in a flat panel display; or used to control surface emissivity, for example, as a coating on an insulating material such as vertical wall supports in flat panel displays.

Inventors:

Jankowski, Alan F ^[1]; Schmid, Anthony P ^[2]

Livermore, CA
Solan Beach, CA

Issue Date:: 2002-01-01

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

OSTI Identifier:: 874591

Patent Number(s):: 6420826

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01C - RESISTORS

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01C - RESISTORS
H01C17/12 - by sputtering

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2201/319 - Circuit elements associated with the emitters by direct integration
H01J31/127 - {using large area or array sources, i.e. essentially a source for each pixel group}

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: flat; panel; display; ti-cr-al-o; film; films; resistor; material; rf; sputter; deposited; ceramic; targets; reactive; gas; mixture; osub2; resistivity; values; 10sup4; 10sup10; ohm-cm; measured; <1; mum; thick; discretely; selected; control; target; composition; deposition; parameters; application; found; thermodynamically; stable; unlike; metal-oxide; vertical; lateral; example; layer; beneath; field; emission; cathode; surface; emissivity; coating; insulating; wall; supports; displays; gas mixture; field emission; panel display; rf sputter; resistivity values; resistor material; sputter deposit; /313/338/

Citation Formats


                    Jankowski, Alan F, and Schmid, Anthony P. Flat panel display using Ti-Cr-Al-O thin film.  United States: N. p., 2002. 
        Web.

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                    Jankowski, Alan F, & Schmid, Anthony P. Flat panel display using Ti-Cr-Al-O thin film.  United States.

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                    Jankowski, Alan F, and Schmid, Anthony P. Tue .  
        "Flat panel display using Ti-Cr-Al-O thin film".  United States.  https://www.osti.gov/servlets/purl/874591.

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@article{osti_874591,

  title        = {Flat panel display using Ti-Cr-Al-O thin film},

  author       = {Jankowski, Alan F and Schmid, Anthony P},

  abstractNote = {Thin films of Ti--Cr--Al--O are used as a resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O.sub.2. Resistivity values from 10.sup.4 to 10.sup.10 Ohm-cm have been measured for Ti--Cr--Al--O film <1 .mu.m thick. The film resistivity can be discretely selected through control of the target composition and the deposition parameters. The application of Ti--Cr--Al--O as a thin film resistor has been found to be thermodynamically stable, unlike other metal-oxide films. The Ti--Cr--Al--O film can be used as a vertical or lateral resistor, for example, as a layer beneath a field emission cathode in a flat panel display; or used to control surface emissivity, for example, as a coating on an insulating material such as vertical wall supports in flat panel displays.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2002},

  month        = {1}

}

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