skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Optical stress generator and detector

Abstract

Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.

Inventors:
 [1];  [2]
  1. Barrington, RI
  2. Duxbury, MA
Issue Date:
Research Org.:
Brown Univ., Providence, RI (United States)
OSTI Identifier:
874491
Patent Number(s):
6400449
Assignee:
Brown University Research Foundation (Providence, RI)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
FG02-86ER45267
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
optical; stress; generator; detector; disclosed; characterization; films; interfaces; measurements; mechanical; thermal; properties; light; absorbed; film; structure; change; transmission; reflection; measured; analyzed; information; ultrasonic; waves; produced; obtained; measurement; methods; apparatus; determination; thickness; speed; accuracy; improved; compared; earlier; elastic; including; presence; roughness; defects; thermal properties; optical stress; stress generator; /356/

Citation Formats

Maris, Humphrey J, and Stoner, Robert J. Optical stress generator and detector. United States: N. p., 2002. Web.
Maris, Humphrey J, & Stoner, Robert J. Optical stress generator and detector. United States.
Maris, Humphrey J, and Stoner, Robert J. Tue . "Optical stress generator and detector". United States. https://www.osti.gov/servlets/purl/874491.
@article{osti_874491,
title = {Optical stress generator and detector},
author = {Maris, Humphrey J and Stoner, Robert J},
abstractNote = {Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

Save / Share:

Works referenced in this record:

Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
journal, November 1992


Ion implant monitoring with thermal wave technology
journal, September 1985


Study of vibrational modes of gold nanostructures by picosecond ultrasonics
journal, January 1993


Picosecond Ellipsometry of Transient Electron-Hole Plasmas in Germanium
journal, May 1974


Picosecond acoustics as a non-destructive tool for the characterization of very thin films
journal, November 1987


Sound velocity and index of refraction of AlAs measured by picosecond ultrasonics
journal, November 1988


Characterization of Transparent and Opaque thin Films Using Laser Picosecond Ultrasonics
journal, June 1992


Carrier lifetime versus ion‐implantation dose in silicon on sapphire
journal, February 1987


Generation and detection of picosecond acoustic pulses in thin metal films
journal, March 1987


Laser Picosecond Acoustics in Various Types of Thin Film
journal, January 1992


Analysis of lattice defects induced by ion implantation with photo‐acoustic displacement measurements
journal, November 1994


Transient thermoreflectance from thin metal films
journal, July 1986


Measurements of the Kapitza conductance between diamond and several metals
journal, March 1992


High Resolution Laser Picosecond Acoustics in Thin Films
book, January 1991


Kapitza conductance and heat flow between solids at temperatures from 50 to 300 K
journal, December 1993


Time-resolved study of vibrations of a -Ge:H/ a -Si:H multilayers
journal, September 1988


Detection of Thin Interfacial Layers by Picosecond Ultrasonics
journal, January 1992


Ultrasonic experiments at ultra-high frequency with picosecond time-resolution
conference, January 1990


Pump/probe method for fast analysis of visible spectral signatures utilizing asynchronous optical sampling
journal, January 1987


Physics of ultrafast phenomena in solid state plasmas
journal, January 1978


Nondestructive testing of microstructures by picosecond ultrasonics
journal, December 1990


Detection of thermal waves through optical reflectance
journal, June 1985


Thermal and plasma wave depth profiling in silicon
journal, September 1985


Surface generation and detection of phonons by picosecond light pulses
journal, September 1986


Measurements of atomic sodium in flames by asynchronous optical sampling: theory and experiment
journal, January 1992


Phonon attenuation and velocity measurements in transparent materials by picosecond acoustic interferometry
journal, April 1991


Thin‐film thickness measurements with thermal waves
journal, July 1983


Attenuation of longitudinal-acoustic phonons in amorphous SiO 2 at frequencies up to 440 GHz
journal, September 1991


Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CF x at the Al/Si interface
journal, October 1992


Picosecond ultrasonics
journal, January 1989


Relationship between Interfacial Strain and the Elastic Response of Multilayer Metal Films
journal, November 1988


Picosecond spectroscopy of semiconductors
journal, January 1978


Asynchronous optical sampling:a new combustion diagnostic for potential use in turbulent, high-pressure flames
journal, January 1989


Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity
journal, September 1994


Picosecond photoinduced electronic and acoustic effects in a-Si:H based multilayer structures
journal, December 1987


Elastic properties of silicon oxynitride films determined by picosecond acoustics
journal, December 1988


A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe -Its Mechanism and Applications to Evaluation of Lattice Damage in Semiconductors
journal, November 1992


Studies of High-Frequency Acoustic Phonons Using Picosecond Optical Techniques
book, January 1986