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Title: Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application

Abstract

The reflectivity and thermal stability of Mo/Si (molybdenum/silicon) multilayer films, used in soft x-ray and extreme ultraviolet region, is enhanced by deposition of a thin layer of boron carbide (e.g., B.sub.4 C) between alternating layers of Mo and Si. The invention is useful for reflective coatings for soft X-ray and extreme ultraviolet optics, multilayer for masks, coatings for other wavelengths and multilayers for masks that are more thermally stable than pure Mo/Si multilayers

Inventors:
 [1];  [2]
  1. (Palo Alto, CA)
  2. Livermore, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
874470
Patent Number(s):
6396900
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multilayer; films; sharp; stable; interfaces; euv; soft; x-ray; application; reflectivity; thermal; stability; mosi; molybdenumsilicon; extreme; ultraviolet; region; enhanced; deposition; layer; boron; carbide; bsub4; alternating; layers; useful; reflective; coatings; optics; masks; wavelengths; multilayers; thermally; pure; extreme ultraviolet; boron carbide; thermal stability; multilayer film; ultraviolet region; layer films; /378/

Citation Formats

Barbee, Jr., Troy W., and Bajt, Sasa. Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application. United States: N. p., 2002. Web.
Barbee, Jr., Troy W., & Bajt, Sasa. Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application. United States.
Barbee, Jr., Troy W., and Bajt, Sasa. Tue . "Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application". United States. https://www.osti.gov/servlets/purl/874470.
@article{osti_874470,
title = {Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application},
author = {Barbee, Jr., Troy W. and Bajt, Sasa},
abstractNote = {The reflectivity and thermal stability of Mo/Si (molybdenum/silicon) multilayer films, used in soft x-ray and extreme ultraviolet region, is enhanced by deposition of a thin layer of boron carbide (e.g., B.sub.4 C) between alternating layers of Mo and Si. The invention is useful for reflective coatings for soft X-ray and extreme ultraviolet optics, multilayer for masks, coatings for other wavelengths and multilayers for masks that are more thermally stable than pure Mo/Si multilayers},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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