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Title: Illumination system having a plurality of movable sources

Abstract

An illumination system includes several discharge sources that are multiplexed together to reduce the amount of debris generated. The system includes: (a) a first electromagnetic radiation source array that includes a plurality of first activatable radiation source elements that are positioned on a first movable carriage; (b) a second electromagnetic radiation source array that includes a plurality of second activatable radiation source elements that are positioned on a second movable carriage; (c) means for directing electromagnetic radiation from the first electromagnetic radiation source array and electromagnetic radiation from the second electromagnetic radiation source array toward a common optical path; (d) means for synchronizing (i) the movements of the first movable carriage and of the second movable carriage and (ii) the activation of the first electromagnetic radiation source array and of the second electromagnetic radiation source array to provide an essentially continuous illumination of electromagnetic radiation along the common optical path.

Inventors:
 [1];  [2]
  1. Albuquerque, NM
  2. Livermore, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874468
Patent Number(s):
6396068
Assignee:
EUV LLC (Livermore, CA)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
illumination; plurality; movable; sources; discharge; multiplexed; reduce; amount; debris; generated; electromagnetic; radiation; source; array; activatable; elements; positioned; carriage; means; directing; common; optical; path; synchronizing; movements; ii; activation; provide; essentially; continuous; electromagnetic radiation; radiation source; optical path; /250/378/

Citation Formats

Sweatt, William C, and Kubiak, Glenn D. Illumination system having a plurality of movable sources. United States: N. p., 2002. Web.
Sweatt, William C, & Kubiak, Glenn D. Illumination system having a plurality of movable sources. United States.
Sweatt, William C, and Kubiak, Glenn D. Tue . "Illumination system having a plurality of movable sources". United States. https://www.osti.gov/servlets/purl/874468.
@article{osti_874468,
title = {Illumination system having a plurality of movable sources},
author = {Sweatt, William C and Kubiak, Glenn D},
abstractNote = {An illumination system includes several discharge sources that are multiplexed together to reduce the amount of debris generated. The system includes: (a) a first electromagnetic radiation source array that includes a plurality of first activatable radiation source elements that are positioned on a first movable carriage; (b) a second electromagnetic radiation source array that includes a plurality of second activatable radiation source elements that are positioned on a second movable carriage; (c) means for directing electromagnetic radiation from the first electromagnetic radiation source array and electromagnetic radiation from the second electromagnetic radiation source array toward a common optical path; (d) means for synchronizing (i) the movements of the first movable carriage and of the second movable carriage and (ii) the activation of the first electromagnetic radiation source array and of the second electromagnetic radiation source array to provide an essentially continuous illumination of electromagnetic radiation along the common optical path.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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