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Title: Microelectromechanical dual-mass resonator structure

Abstract

A dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven to move along a linear or curved path by a parallel-plate electrostatic actuator. A second mass, which is also suspended and coupled to the first mass by a plurality of springs is driven by motion of the first mass. Various modes of operation of the MEM structure are possible, including resonant and antiresonant modes, and a contacting mode. In each mode of operation, the motion induced in the second mass can be in the range of several microns up to more than 50 .mu.m while the first mass has a much smaller displacement on the order of one micron or less. The MEM structure has applications for forming microsensors that detect strain, acceleration, rotation or movement.

Inventors:
 [1];  [2];  [3]
  1. Cedar Crest, NM
  2. Albuquerque, NM
  3. Bountiful, UT
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874455
Patent Number(s):
6393913
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microelectromechanical; dual-mass; resonator; structure; disclosed; mass; suspended; substrate; driven; move; linear; curved; path; parallel-plate; electrostatic; actuator; coupled; plurality; springs; motion; modes; operation; including; resonant; antiresonant; contacting; mode; induced; range; microns; 50; mum; displacement; micron; applications; forming; microsensors; detect; strain; acceleration; rotation; movement; resonator structure; /73/333/

Citation Formats

Dyck, Christopher W, Allen, James J, and Huber, Robert J. Microelectromechanical dual-mass resonator structure. United States: N. p., 2002. Web.
Dyck, Christopher W, Allen, James J, & Huber, Robert J. Microelectromechanical dual-mass resonator structure. United States.
Dyck, Christopher W, Allen, James J, and Huber, Robert J. Tue . "Microelectromechanical dual-mass resonator structure". United States. https://www.osti.gov/servlets/purl/874455.
@article{osti_874455,
title = {Microelectromechanical dual-mass resonator structure},
author = {Dyck, Christopher W and Allen, James J and Huber, Robert J},
abstractNote = {A dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven to move along a linear or curved path by a parallel-plate electrostatic actuator. A second mass, which is also suspended and coupled to the first mass by a plurality of springs is driven by motion of the first mass. Various modes of operation of the MEM structure are possible, including resonant and antiresonant modes, and a contacting mode. In each mode of operation, the motion induced in the second mass can be in the range of several microns up to more than 50 .mu.m while the first mass has a much smaller displacement on the order of one micron or less. The MEM structure has applications for forming microsensors that detect strain, acceleration, rotation or movement.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

Parallel-plate electrostatic dual-mass resonator
conference, August 1999


Thermal base drive for micromechanical resonators employing deep-diffusion bases
journal, June 1993


Reflexions on the future of microsystems
journal, January 1999


New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes
journal, April 1998