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Title: Parallel detecting, spectroscopic ellipsometers/polarimeters

Abstract

The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.

Inventors:
 [1]
  1. 15927 W. Ellsworth, Golden, CO 80401
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
OSTI Identifier:
874410
Patent Number(s):
6384916
Assignee:
Furtak; Thomas E. (15927 W. Ellsworth, Golden, CO 80401)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC36-83CH10093; AC36-98GO10337
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
parallel; detecting; spectroscopic; ellipsometerspolarimeters; ellipsometerpolarimeter; sensor; moving; operates; real-time; in-situ; monitoring; film; surface; properties; sample; processing; chamber; multi-spectral; source; radiation; producing; collimated; beam; directed; towards; polarizer; polarized; impacts; reflected; changing; polarization; due; intrinsic; material; light; separated; separate; filtered; beams; individual; spectral; intensities; data; collected; transmitted; spectrometers; analyzed; transformation; algorithms; collimated beam; surface properties; film surface; /356/

Citation Formats

Furtak, Thomas E. Parallel detecting, spectroscopic ellipsometers/polarimeters. United States: N. p., 2002. Web.
Furtak, Thomas E. Parallel detecting, spectroscopic ellipsometers/polarimeters. United States.
Furtak, Thomas E. Tue . "Parallel detecting, spectroscopic ellipsometers/polarimeters". United States. https://www.osti.gov/servlets/purl/874410.
@article{osti_874410,
title = {Parallel detecting, spectroscopic ellipsometers/polarimeters},
author = {Furtak, Thomas E},
abstractNote = {The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

Division-of-amplitude Photopolarimeter (DOAP) for the Simultaneous Measurement of All Four Stokes Parameters of Light
journal, May 1982


Four-channel polarimeter for time-resolved ellipsometry
journal, January 1987


Accurate calibration of the four-detector photopolarimeter with imperfect polarizing optical elements
journal, January 1989


Spectrophotopolarimeter: fast simultaneous real-time measurement of light parameters
journal, January 1992


Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry
journal, October 1979


Construction, calibration, and testing of a four‚Äźdetector photopolarimeter
journal, January 1988