Parallel detecting, spectroscopic ellipsometers/polarimeters
Abstract
The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.
- Inventors:
-
- 15927 W. Ellsworth, Golden, CO 80401
- Issue Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- OSTI Identifier:
- 874410
- Patent Number(s):
- 6384916
- Assignee:
- Furtak; Thomas E. (15927 W. Ellsworth, Golden, CO 80401)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC36-83CH10093; AC36-98GO10337
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- parallel; detecting; spectroscopic; ellipsometerspolarimeters; ellipsometerpolarimeter; sensor; moving; operates; real-time; in-situ; monitoring; film; surface; properties; sample; processing; chamber; multi-spectral; source; radiation; producing; collimated; beam; directed; towards; polarizer; polarized; impacts; reflected; changing; polarization; due; intrinsic; material; light; separated; separate; filtered; beams; individual; spectral; intensities; data; collected; transmitted; spectrometers; analyzed; transformation; algorithms; collimated beam; surface properties; film surface; /356/
Citation Formats
Furtak, Thomas E. Parallel detecting, spectroscopic ellipsometers/polarimeters. United States: N. p., 2002.
Web.
Furtak, Thomas E. Parallel detecting, spectroscopic ellipsometers/polarimeters. United States.
Furtak, Thomas E. Tue .
"Parallel detecting, spectroscopic ellipsometers/polarimeters". United States. https://www.osti.gov/servlets/purl/874410.
@article{osti_874410,
title = {Parallel detecting, spectroscopic ellipsometers/polarimeters},
author = {Furtak, Thomas E},
abstractNote = {The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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