Quartz antenna with hollow conductor
Abstract
A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.
- Inventors:
-
- Hercules, CA
- Alameda, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 874371
- Patent Number(s):
- 6376978
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- quartz; antenna; hollow; conductor; radio; frequency; rf; plasma; sources; formed; metal; tube; disposed; glass; tubular; internal; flow; channel; coolant; leakage; outer; breaks; portion; coil; inductively; coupling; power; source; chamber; inserting; inside; forming; glassmetal; composite; shape; radio frequency; metal tube; glass tube; rf antenna; metal conduct; /313/315/428/
Citation Formats
Leung, Ka-Ngo, and Benabou, Elie. Quartz antenna with hollow conductor. United States: N. p., 2002.
Web.
Leung, Ka-Ngo, & Benabou, Elie. Quartz antenna with hollow conductor. United States.
Leung, Ka-Ngo, and Benabou, Elie. Tue .
"Quartz antenna with hollow conductor". United States. https://www.osti.gov/servlets/purl/874371.
@article{osti_874371,
title = {Quartz antenna with hollow conductor},
author = {Leung, Ka-Ngo and Benabou, Elie},
abstractNote = {A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}