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Title: Quartz antenna with hollow conductor

Abstract

A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.

Inventors:
 [1];  [2]
  1. Hercules, CA
  2. Alameda, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
874371
Patent Number(s):
6376978
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
quartz; antenna; hollow; conductor; radio; frequency; rf; plasma; sources; formed; metal; tube; disposed; glass; tubular; internal; flow; channel; coolant; leakage; outer; breaks; portion; coil; inductively; coupling; power; source; chamber; inserting; inside; forming; glassmetal; composite; shape; radio frequency; metal tube; glass tube; rf antenna; metal conduct; /313/315/428/

Citation Formats

Leung, Ka-Ngo, and Benabou, Elie. Quartz antenna with hollow conductor. United States: N. p., 2002. Web.
Leung, Ka-Ngo, & Benabou, Elie. Quartz antenna with hollow conductor. United States.
Leung, Ka-Ngo, and Benabou, Elie. Tue . "Quartz antenna with hollow conductor". United States. https://www.osti.gov/servlets/purl/874371.
@article{osti_874371,
title = {Quartz antenna with hollow conductor},
author = {Leung, Ka-Ngo and Benabou, Elie},
abstractNote = {A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

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