Gas-driven microturbine
Abstract
A microturbine fabricated by a three-level semiconductor batch-fabrication process based on polysilicon surface-micromachining. The microturbine comprises microelectromechanical elements formed from three polysilicon multi-layer surfaces applied to a silicon substrate. Interleaving sacrificial oxide layers provides electrical and physical isolation, and selective etching of both the sacrificial layers and the polysilicon layers allows formation of individual mechanical and electrical elements as well as the required space for necessary movement of rotating turbine parts and linear elements.
- Inventors:
-
- Albuquerque, NM
- Cedar Crest, NM
- Tijeras, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874309
- Patent Number(s):
- 6363712
- Assignee:
- The United States of America as represented by the United States Department (Washington, DC)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F01 - MACHINES OR ENGINES IN GENERAL F01D - NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
F - MECHANICAL ENGINEERING F02 - COMBUSTION ENGINES F02C - GAS-TURBINE PLANTS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- gas-driven; microturbine; fabricated; three-level; semiconductor; batch-fabrication; process; based; polysilicon; surface-micromachining; microelectromechanical; elements; formed; multi-layer; surfaces; applied; silicon; substrate; interleaving; sacrificial; oxide; layers; provides; electrical; physical; isolation; selective; etching; allows; formation; individual; mechanical; required; space; movement; rotating; turbine; linear; oxide layer; silicon substrate; fabrication process; elements formed; silicon surface; /60/216/310/
Citation Formats
Sniegowski, Jeffrey J, Rodgers, Murray S, McWhorter, Paul J, Aeschliman, Daniel P, and Miller, William M. Gas-driven microturbine. United States: N. p., 2002.
Web.
Sniegowski, Jeffrey J, Rodgers, Murray S, McWhorter, Paul J, Aeschliman, Daniel P, & Miller, William M. Gas-driven microturbine. United States.
Sniegowski, Jeffrey J, Rodgers, Murray S, McWhorter, Paul J, Aeschliman, Daniel P, and Miller, William M. Tue .
"Gas-driven microturbine". United States. https://www.osti.gov/servlets/purl/874309.
@article{osti_874309,
title = {Gas-driven microturbine},
author = {Sniegowski, Jeffrey J and Rodgers, Murray S and McWhorter, Paul J and Aeschliman, Daniel P and Miller, William M},
abstractNote = {A microturbine fabricated by a three-level semiconductor batch-fabrication process based on polysilicon surface-micromachining. The microturbine comprises microelectromechanical elements formed from three polysilicon multi-layer surfaces applied to a silicon substrate. Interleaving sacrificial oxide layers provides electrical and physical isolation, and selective etching of both the sacrificial layers and the polysilicon layers allows formation of individual mechanical and electrical elements as well as the required space for necessary movement of rotating turbine parts and linear elements.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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