skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method to fabricate layered material compositions

Abstract

A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.

Inventors:
 [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
874292
Patent Number(s):
6358854
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; fabricate; layered; material; compositions; processes; suited; fabrication; disclosed; typically; three-dimensional; structures; decomposed; stack; structured; layers; examples; photonic; lattices; combines; characteristic; features; photolithography; chemical-mechanical; polishing; permit; direct; facile; bandgaps; 01-20mu; spectral; range; dimensional structure; /438/

Citation Formats

Fleming, James G., and Lin, Shawn-Yu. Method to fabricate layered material compositions. United States: N. p., 2002. Web.
Fleming, James G., & Lin, Shawn-Yu. Method to fabricate layered material compositions. United States.
Fleming, James G., and Lin, Shawn-Yu. Tue . "Method to fabricate layered material compositions". United States. https://www.osti.gov/servlets/purl/874292.
@article{osti_874292,
title = {Method to fabricate layered material compositions},
author = {Fleming, James G. and Lin, Shawn-Yu},
abstractNote = {A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

Save / Share: