Method to fabricate layered material compositions
Abstract
A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874292
- Patent Number(s):
- 6358854
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; fabricate; layered; material; compositions; processes; suited; fabrication; disclosed; typically; three-dimensional; structures; decomposed; stack; structured; layers; examples; photonic; lattices; combines; characteristic; features; photolithography; chemical-mechanical; polishing; permit; direct; facile; bandgaps; 01-20mu; spectral; range; dimensional structure; /438/
Citation Formats
Fleming, James G, and Lin, Shawn-Yu. Method to fabricate layered material compositions. United States: N. p., 2002.
Web.
Fleming, James G, & Lin, Shawn-Yu. Method to fabricate layered material compositions. United States.
Fleming, James G, and Lin, Shawn-Yu. Tue .
"Method to fabricate layered material compositions". United States. https://www.osti.gov/servlets/purl/874292.
@article{osti_874292,
title = {Method to fabricate layered material compositions},
author = {Fleming, James G and Lin, Shawn-Yu},
abstractNote = {A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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