skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use

Abstract

A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.

Inventors:
 [1]
  1. Pleasanton, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874232
Patent Number(s):
6346030
Assignee:
Sandia Corporation (Livermore, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microdevice; interior; cavity; aspect; ratio; surface; features; associated; methods; manufacture; ultrasmooth; surfaces; method; described; liga-produced; shaped; bit; contour; polish; sacrificial; mandrel; contoured; subsequently; coated; structural; material; removed; produce; microdevices; micrometer-sized; sub-micrometer; rms; roughness; smooth surface; associated method; interior cavity; surface feature; /451/

Citation Formats

Morales, Alfredo M. Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use. United States: N. p., 2002. Web.
Morales, Alfredo M. Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use. United States.
Morales, Alfredo M. Tue . "Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use". United States. https://www.osti.gov/servlets/purl/874232.
@article{osti_874232,
title = {Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use},
author = {Morales, Alfredo M},
abstractNote = {A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

Save / Share: