Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use
Abstract
A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.
- Inventors:
-
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874232
- Patent Number(s):
- 6346030
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25D - PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- microdevice; interior; cavity; aspect; ratio; surface; features; associated; methods; manufacture; ultrasmooth; surfaces; method; described; liga-produced; shaped; bit; contour; polish; sacrificial; mandrel; contoured; subsequently; coated; structural; material; removed; produce; microdevices; micrometer-sized; sub-micrometer; rms; roughness; smooth surface; associated method; interior cavity; surface feature; /451/
Citation Formats
Morales, Alfredo M. Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use. United States: N. p., 2002.
Web.
Morales, Alfredo M. Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use. United States.
Morales, Alfredo M. Tue .
"Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use". United States. https://www.osti.gov/servlets/purl/874232.
@article{osti_874232,
title = {Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use},
author = {Morales, Alfredo M},
abstractNote = {A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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