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Title: Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film

Abstract

Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

Inventors:
 [1];  [2]
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  1. Knoxville, TN
  2. Oak Ridge, TN
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
874196
Patent Number(s):
6336366
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
piezoelectrically; tunable; resonance; frequency; beam; utilizing; stress-sensitive; film; methods; apparatus; detecting; frequencies; acoustic; vibration; utilize; piezoelectrically-tunable; element; piezoelectric; layer; stress; sensitive; means; providing; electrical; potential; controllably; change; beams; stiffness; determined; response; acoustical; exposed; detected; resonance frequency; sensitive film; acoustic vibration; /73/310/

Citation Formats

Thundat, Thomas G, and Wachter, Eric A. Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film. United States: N. p., 2002. Web.
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Thundat, Thomas G, & Wachter, Eric A. Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film. United States.
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Thundat, Thomas G, and Wachter, Eric A. Tue . "Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film". United States. https://www.osti.gov/servlets/purl/874196.
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@article{osti_874196,
title = {Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film},
author = {Thundat, Thomas G and Wachter, Eric A},
abstractNote = {Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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Works referenced in this record:

Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995

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