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Title: Surface-micromachined chain for use in microelectromechanical structures

Abstract

A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.

Inventors:
 [1]
  1. (Rio Rancho, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
874158
Patent Number(s):
6328903
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface-micromachined; chain; microelectromechanical; structures; structure; incorporating; disclosed; fabricated; substrate; silicon; depositing; patterning; plurality; alternating; layers; chain-forming; material; polycrystalline; sacrificial; dioxide; silicate; glass; removed; etching; release; movement; applications; forming; types; devices; microengine; electrostatic; motor; connected; rotate; drive; sprocket; driven; sprockets; silicon substrate; various types; mechanical structure; /216/59/

Citation Formats

Vernon, Sr., George E. Surface-micromachined chain for use in microelectromechanical structures. United States: N. p., 2001. Web.
Vernon, Sr., George E. Surface-micromachined chain for use in microelectromechanical structures. United States.
Vernon, Sr., George E. Mon . "Surface-micromachined chain for use in microelectromechanical structures". United States. https://www.osti.gov/servlets/purl/874158.
@article{osti_874158,
title = {Surface-micromachined chain for use in microelectromechanical structures},
author = {Vernon, Sr., George E.},
abstractNote = {A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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