Surface-micromachined chain for use in microelectromechanical structures
Abstract
A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.
- Inventors:
-
- (Rio Rancho, NM)
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874158
- Patent Number(s):
- 6328903
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- surface-micromachined; chain; microelectromechanical; structures; structure; incorporating; disclosed; fabricated; substrate; silicon; depositing; patterning; plurality; alternating; layers; chain-forming; material; polycrystalline; sacrificial; dioxide; silicate; glass; removed; etching; release; movement; applications; forming; types; devices; microengine; electrostatic; motor; connected; rotate; drive; sprocket; driven; sprockets; silicon substrate; various types; mechanical structure; /216/59/
Citation Formats
Vernon, Sr., George E. Surface-micromachined chain for use in microelectromechanical structures. United States: N. p., 2001.
Web.
Vernon, Sr., George E. Surface-micromachined chain for use in microelectromechanical structures. United States.
Vernon, Sr., George E. Mon .
"Surface-micromachined chain for use in microelectromechanical structures". United States. https://www.osti.gov/servlets/purl/874158.
@article{osti_874158,
title = {Surface-micromachined chain for use in microelectromechanical structures},
author = {Vernon, Sr., George E.},
abstractNote = {A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}