Highly damped kinematic coupling for precision instruments
Abstract
A highly damped kinematic coupling for precision instruments. The kinematic coupling provides support while causing essentially no influence to its nature shape, with such influences coming, for example, from manufacturing tolerances, temperature changes, or ground motion. The coupling uses three ball-cone constraints, each combined with a released flexural degree of freedom. This arrangement enables a gain of higher load capacity and stiffness, but can also significantly reduce the friction level in proportion to the ball radius divided by the distance between the ball and the hinge axis. The blade flexures reduces somewhat the stiffness of the coupling and provides an ideal location to apply constrained-layer damping which is accomplished by attaching a viscoelastic layer and a constraining layer on opposite sides of each of the blade flexures. The three identical ball-cone flexures provide a damped coupling mechanism to kinematically support the projection optics system of the extreme ultraviolet lithography (EUVL) system, or other load-sensitive apparatus.
- Inventors:
-
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 874143
- Patent Number(s):
- 6325351
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16F - SPRINGS
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- highly; damped; kinematic; coupling; precision; instruments; provides; support; causing; essentially; influence; nature; shape; influences; coming; example; manufacturing; tolerances; temperature; changes; ground; motion; ball-cone; constraints; combined; released; flexural; degree; freedom; arrangement; enables; load; capacity; stiffness; significantly; reduce; friction; level; proportion; ball; radius; divided; distance; hinge; axis; blade; flexures; reduces; somewhat; ideal; location; apply; constrained-layer; damping; accomplished; attaching; viscoelastic; layer; constraining; opposite; identical; provide; mechanism; kinematically; projection; optics; extreme; ultraviolet; lithography; euvl; load-sensitive; apparatus; extreme ultraviolet; ultraviolet lithography; provides support; /248/52/
Citation Formats
Hale, Layton C, and Jensen, Steven A. Highly damped kinematic coupling for precision instruments. United States: N. p., 2001.
Web.
Hale, Layton C, & Jensen, Steven A. Highly damped kinematic coupling for precision instruments. United States.
Hale, Layton C, and Jensen, Steven A. Mon .
"Highly damped kinematic coupling for precision instruments". United States. https://www.osti.gov/servlets/purl/874143.
@article{osti_874143,
title = {Highly damped kinematic coupling for precision instruments},
author = {Hale, Layton C and Jensen, Steven A},
abstractNote = {A highly damped kinematic coupling for precision instruments. The kinematic coupling provides support while causing essentially no influence to its nature shape, with such influences coming, for example, from manufacturing tolerances, temperature changes, or ground motion. The coupling uses three ball-cone constraints, each combined with a released flexural degree of freedom. This arrangement enables a gain of higher load capacity and stiffness, but can also significantly reduce the friction level in proportion to the ball radius divided by the distance between the ball and the hinge axis. The blade flexures reduces somewhat the stiffness of the coupling and provides an ideal location to apply constrained-layer damping which is accomplished by attaching a viscoelastic layer and a constraining layer on opposite sides of each of the blade flexures. The three identical ball-cone flexures provide a damped coupling mechanism to kinematically support the projection optics system of the extreme ultraviolet lithography (EUVL) system, or other load-sensitive apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
Works referenced in this record:
Principles and techniques for designing precision machines
report, February 1999
- Hale, Layton Carter
Highly damped exactly constrained mounting of an x-ray telescope
conference, May 1995
- Wilke, Paul S.; Decker, Todd A.; Hale, Layton C.
- Smart Structures & Materials '95, SPIE Proceedings