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Title: Plasma treatment for producing electron emitters

Abstract

Plasma treatment for producing carbonaceous field emission electron emitters is disclosed. A plasma of ions is generated in a closed chamber and used to surround the exposed surface of a carbonaceous material. A voltage is applied to an electrode that is in contact with the carbonaceous material. This voltage has a negative potential relative to a second electrode in the chamber and serves to accelerate the ions toward the carbonaceous material and provide an ion energy sufficient to etch the exposed surface of the carbonaceous material but not sufficient to result in the implantation of the ions within the carbonaceous material. Preferably, the ions used are those of an inert gas or an inert gas with a small amount of added nitrogen.

Inventors:
 [1];  [2]
  1. (Santa Fe, NM)
  2. (Los Alamos, NM)
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
874126
Patent Number(s):
6319367
Assignee:
E.I. duPont de Nemours and Co. (Wilmington, DE); The Regents of the University of California (Oakland, CA) LANL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
plasma; treatment; producing; electron; emitters; carbonaceous; field; emission; disclosed; generated; closed; chamber; surround; exposed; surface; material; voltage; applied; electrode; contact; negative; potential; serves; accelerate; provide; energy; sufficient; etch; result; implantation; inert; gas; amount; added; nitrogen; carbonaceous material; inert gas; field emission; exposed surface; emission electron; closed chamber; producing carbon; /204/

Citation Formats

Coates, Don Mayo, and Walter, Kevin Carl. Plasma treatment for producing electron emitters. United States: N. p., 2001. Web.
Coates, Don Mayo, & Walter, Kevin Carl. Plasma treatment for producing electron emitters. United States.
Coates, Don Mayo, and Walter, Kevin Carl. Mon . "Plasma treatment for producing electron emitters". United States. https://www.osti.gov/servlets/purl/874126.
@article{osti_874126,
title = {Plasma treatment for producing electron emitters},
author = {Coates, Don Mayo and Walter, Kevin Carl},
abstractNote = {Plasma treatment for producing carbonaceous field emission electron emitters is disclosed. A plasma of ions is generated in a closed chamber and used to surround the exposed surface of a carbonaceous material. A voltage is applied to an electrode that is in contact with the carbonaceous material. This voltage has a negative potential relative to a second electrode in the chamber and serves to accelerate the ions toward the carbonaceous material and provide an ion energy sufficient to etch the exposed surface of the carbonaceous material but not sufficient to result in the implantation of the ions within the carbonaceous material. Preferably, the ions used are those of an inert gas or an inert gas with a small amount of added nitrogen.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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