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Title: Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state

Abstract

A digital feedback control circuit is disclosed for use in an accelerometer (e.g. a microelectromechanical accelerometer). The digital feedback control circuit, which periodically re-centers a proof mass in response to a sensed acceleration, is based on a sigma-delta (.SIGMA..DELTA.) configuration that includes a notch filter (e.g. a digital switched-capacitor filter) for rejecting signals due to mechanical resonances of the proof mass and further includes a comparator (e.g. a three-level comparator). The comparator generates one of three possible feedback states, with two of the feedback states acting to re-center the proof mass when that is needed, and with a third feedback state being an "idle" state which does not act to move the proof mass when no re-centering is needed. Additionally, the digital feedback control system includes an auto-zero trim capability for calibration of the accelerometer for accurate sensing of acceleration. The digital feedback control circuit can be fabricated using complementary metal-oxide semiconductor (CMOS) technology, bi-CMOS technology or bipolar technology and used in single- and dual-proof-mass accelerometers.

Inventors:
 [1];  [2];  [1]
  1. (Albuquerque, NM)
  2. (Bozeman, MT)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
874050
Patent Number(s):
6301965
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microelectromechanical; accelerometer; resonance-cancelling; control; circuit; including; idle; digital; feedback; disclosed; periodically; re-centers; proof; mass; response; sensed; acceleration; based; sigma-delta; sigmadelta; configuration; notch; filter; switched-capacitor; rejecting; signals; due; mechanical; resonances; comparator; three-level; generates; acting; re-center; third; move; re-centering; additionally; auto-zero; trim; capability; calibration; accurate; sensing; fabricated; complementary; metal-oxide; semiconductor; cmos; technology; bi-cmos; bipolar; single-; dual-proof-mass; accelerometers; control circuit; feedback control; circuit including; /73/

Citation Formats

Chu, Dahlon D., Thelen, Jr., Donald C., and Campbell, David V. Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state. United States: N. p., 2001. Web.
Chu, Dahlon D., Thelen, Jr., Donald C., & Campbell, David V. Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state. United States.
Chu, Dahlon D., Thelen, Jr., Donald C., and Campbell, David V. Mon . "Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state". United States. https://www.osti.gov/servlets/purl/874050.
@article{osti_874050,
title = {Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state},
author = {Chu, Dahlon D. and Thelen, Jr., Donald C. and Campbell, David V.},
abstractNote = {A digital feedback control circuit is disclosed for use in an accelerometer (e.g. a microelectromechanical accelerometer). The digital feedback control circuit, which periodically re-centers a proof mass in response to a sensed acceleration, is based on a sigma-delta (.SIGMA..DELTA.) configuration that includes a notch filter (e.g. a digital switched-capacitor filter) for rejecting signals due to mechanical resonances of the proof mass and further includes a comparator (e.g. a three-level comparator). The comparator generates one of three possible feedback states, with two of the feedback states acting to re-center the proof mass when that is needed, and with a third feedback state being an "idle" state which does not act to move the proof mass when no re-centering is needed. Additionally, the digital feedback control system includes an auto-zero trim capability for calibration of the accelerometer for accurate sensing of acceleration. The digital feedback control circuit can be fabricated using complementary metal-oxide semiconductor (CMOS) technology, bi-CMOS technology or bipolar technology and used in single- and dual-proof-mass accelerometers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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