Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Christen, David K; He, Qing

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Title: Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Abstract

The present invention provides a biaxially textured laminate article having a polycrystalline biaxially textured metallic substrate with an electrically conductive oxide layer epitaxially deposited thereon and methods for producing same. In one embodiment a biaxially texture Ni substrate has a layer of LaNiO.sub.3 deposited thereon. An initial layer of electrically conductive oxide buffer is epitaxially deposited using a sputtering technique using a sputtering gas which is an inert or forming gas. A subsequent layer of an electrically conductive oxide layer is then epitaxially deposited onto the initial layer using a sputtering gas comprising oxygen. The present invention will enable the formation of biaxially textured devices which include HTS wires and interconnects, large area or long length ferromagnetic and/or ferroelectric memory devices, large area or long length, flexible light emitting semiconductors, ferroelectric tapes, and electrodes.

Inventors:

Christen, David K ^[1]; He, Qing ^[2]

Oak Ridge, TN
Bloomington, MN

Issue Date:: 2001-01-01

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

OSTI Identifier:: 874024

Patent Number(s):: 6296701

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

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C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B23/02 - Epitaxial-layer growth
C30B29/24 - with formula AMeO3, wherein A is a rare earth metal and Me is Fe, Ga, Sc, Cr, Co or Al, e.g. ortho ferrites

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DOE Contract Number:: AC05-96OR22464

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; depositing; electrically; conductive; oxide; film; textured; metallic; substrate; articles; formed; therefrom; provides; biaxially; laminate; article; polycrystalline; layer; epitaxially; deposited; thereon; methods; producing; embodiment; texture; lanio; initial; buffer; sputtering; technique; gas; inert; forming; subsequent; comprising; oxygen; enable; formation; devices; wires; interconnects; length; ferromagnetic; ferroelectric; memory; flexible; light; emitting; semiconductors; tapes; electrodes; memory device; formed therefrom; forming gas; conductive oxide; epitaxially deposited; biaxially textured; electrically conductive; oxide layer; deposited thereon; oxide film; light emitting; gas comprising; metallic substrate; textured metallic; textured metal; sputtering gas; oxide buffer; ferroelectric memory; articles formed; laminate article; emitting semiconductor; /117/505/

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                    Christen, David K, and He, Qing. Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom.  United States: N. p., 2001. 
        Web.

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                    Christen, David K, & He, Qing. Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom.  United States.

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                    Christen, David K, and He, Qing. Mon .  
        "Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom".  United States.  https://www.osti.gov/servlets/purl/874024.

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@article{osti_874024,

  title        = {Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom},

  author       = {Christen, David K and He, Qing},

  abstractNote = {The present invention provides a biaxially textured laminate article having a polycrystalline biaxially textured metallic substrate with an electrically conductive oxide layer epitaxially deposited thereon and methods for producing same. In one embodiment a biaxially texture Ni substrate has a layer of LaNiO.sub.3 deposited thereon. An initial layer of electrically conductive oxide buffer is epitaxially deposited using a sputtering technique using a sputtering gas which is an inert or forming gas. A subsequent layer of an electrically conductive oxide layer is then epitaxially deposited onto the initial layer using a sputtering gas comprising oxygen. The present invention will enable the formation of biaxially textured devices which include HTS wires and interconnects, large area or long length ferromagnetic and/or ferroelectric memory devices, large area or long length, flexible light emitting semiconductors, ferroelectric tapes, and electrodes.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2001},

  month        = {1}

}

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Works referenced in this record:

In‐plane epitaxial alignment of YBa ₂ Cu ₃ O _{7− x} films grown on silver crystals and buffer layers
journal, April 1993

Budai, J. D.; Young, R. T.; Chao, B. S.
Applied Physics Letters, Vol. 62, Issue 15
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Epitaxial YBa ₂ Cu ₃ O _7−δ thin films on SrRuO ₃ /Pt/MgO
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Tiwari, P.; Wu, X. D.; Foltyn, S. R.
Applied Physics Letters, Vol. 64, Issue 5
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Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films
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Reade, R. P.; Berdahl, P.; Russo, R. E.
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High‐field critical current densities in Bi ₂ Sr ₂ Ca ₁ Cu ₂ O _{8+ x} /Ag wires
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Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high T_c bulk material
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Synthesis of PbTiO3 film on LaNiO3-coated substrate by the spray-ICP technique
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Journal of Materials Science, Vol. 29, Issue 19
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Preparation of high quality YBa/sub 2/Cu/sub 3/O/sub 7-δ/ thick films on flexible Ni-based alloy substrates with textured buffer layers
journal, June 1995

Wu, X. D.; Foltyn, S. R.; Arendt, P.
IEEE Transactions on Appiled Superconductivity, Vol. 5, Issue 2
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Metal buffer layers and Y‐Ba‐Cu‐O thin films on Pt and stainless steel using pulsed laser deposition
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Russo, R. E.; Reade, R. P.; McMillan, J. M.
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High critical current densities in Bi(2223)/Ag tapes
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Superconductor Science and Technology, Vol. 5, Issue 1S
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a ‐axis oriented epitaxial YBa ₂ Cu ₃ O _{7− x} ‐PrBa ₂ Cu ₃ O _{7− y} heterostructures
journal, December 1990

Inam, A.; Rogers, C. T.; Ramesh, R.
Applied Physics Letters, Vol. 57, Issue 23
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Preparation of (100)‐oriented metallic LaNiO ₃ thin films on Si substrates by radio frequency magnetron sputtering for the growth of textured Pb(Zr _0.53 Ti _0.47 )O ₃
journal, May 1995

Yang, Ching‐Chyuan; Chen, Ming‐Sen; Hong, Tian‐Jue
Applied Physics Letters, Vol. 66, Issue 20
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Epitaxial YBa2Cu3O7 on Biaxially Textured Nickel (001): An Approach to Superconducting Tapes with High Critical Current Density
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Norton, D. P.; Goyal, A.; Budai, J. D.
Science, Vol. 274, Issue 5288
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LaNiO/sub 3/: a promising material for contact with YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
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IEEE Transactions on Appiled Superconductivity, Vol. 5, Issue 4
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High critical current density superconducting tapes by epitaxial deposition of YBa₂Cu₃O_x thick films on biaxially textured metals
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Applied Physics Letters, Vol. 69, Issue 12, p. 1795-1797
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Preparation of epitaxial metallic LaNiO ₃ films on SrTiO ₃ by metalorganic decomposition for the oriented growth of PbTiO ₃
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journal, March 1991

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IEEE Transactions on Magnetics, Vol. 27, Issue 2
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Effects of target and template layer on the properties of highly crystalline superconducting a-axis films of Y1Ba2Cu3O7−x by DC-sputtering
journal, August 1993

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journal, June 1990

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Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

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Similar Records

Title: Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Abstract

Citation Formats

In‐plane epitaxial alignment of YBa 2 Cu 3 O 7− x films grown on silver crystals and buffer layers journal, April 1993

Epitaxial YBa 2 Cu 3 O 7−δ thin films on SrRuO 3 /Pt/MgO journal, January 1994

Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films journal, November 1992

High‐field critical current densities in Bi 2 Sr 2 Ca 1 Cu 2 O 8+ x /Ag wires journal, December 1989

Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material journal, August 1987

Synthesis of PbTiO3 film on LaNiO3-coated substrate by the spray-ICP technique journal, October 1994

Preparation of high quality YBa/sub 2/Cu/sub 3/O/sub 7-δ/ thick films on flexible Ni-based alloy substrates with textured buffer layers journal, June 1995

Metal buffer layers and Y‐Ba‐Cu‐O thin films on Pt and stainless steel using pulsed laser deposition journal, August 1990

High critical current densities in Bi(2223)/Ag tapes journal, January 1992

a ‐axis oriented epitaxial YBa 2 Cu 3 O 7− x ‐PrBa 2 Cu 3 O 7− y heterostructures journal, December 1990

Preparation of (100)‐oriented metallic LaNiO 3 thin films on Si substrates by radio frequency magnetron sputtering for the growth of textured Pb(Zr 0.53 Ti 0.47 )O 3 journal, May 1995

Epitaxial YBa2Cu3O7 on Biaxially Textured Nickel (001): An Approach to Superconducting Tapes with High Critical Current Density journal, November 1996

LaNiO/sub 3/: a promising material for contact with YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films journal, January 1995

High critical current density superconducting tapes by epitaxial deposition of YBa2Cu3Ox thick films on biaxially textured metals journal, September 1996

Preparation of epitaxial metallic LaNiO 3 films on SrTiO 3 by metalorganic decomposition for the oriented growth of PbTiO 3 journal, July 1996

High-J/sub c/ silver-sheathed Bi-based superconducting wires journal, March 1991

Growth of biaxially textured buffer layers on rolled-Ni substrates by electron beam evaporation journal, February 1997

Growth of C-axis oriented YBaCuO films on oxidized textured Ni sheets and on journal, March 1991

Effects of target and template layer on the properties of highly crystalline superconducting a-axis films of Y1Ba2Cu3O7−x by DC-sputtering journal, August 1993

Structural and transport properties of biaxially aligned YBa 2 Cu 3 O 7− x films on polycrystalline Ni‐based alloy with ion‐beam‐modified buffer layers journal, August 1993

Superconducting YBa 2 Cu 3 O 6.8 films on metallic substrates using in situ laser deposition journal, June 1990

In‐plane epitaxial alignment of YBa ₂ Cu ₃ O _{7− x} films grown on silver crystals and buffer layers
journal, April 1993

Epitaxial YBa ₂ Cu ₃ O _7−δ thin films on SrRuO ₃ /Pt/MgO
journal, January 1994

Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films
journal, November 1992

High‐field critical current densities in Bi ₂ Sr ₂ Ca ₁ Cu ₂ O _{8+ x} /Ag wires
journal, December 1989

Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high T_c bulk material
journal, August 1987

Synthesis of PbTiO3 film on LaNiO3-coated substrate by the spray-ICP technique
journal, October 1994

Preparation of high quality YBa/sub 2/Cu/sub 3/O/sub 7-δ/ thick films on flexible Ni-based alloy substrates with textured buffer layers
journal, June 1995

Metal buffer layers and Y‐Ba‐Cu‐O thin films on Pt and stainless steel using pulsed laser deposition
journal, August 1990

High critical current densities in Bi(2223)/Ag tapes
journal, January 1992

a ‐axis oriented epitaxial YBa ₂ Cu ₃ O _{7− x} ‐PrBa ₂ Cu ₃ O _{7− y} heterostructures
journal, December 1990

Preparation of (100)‐oriented metallic LaNiO ₃ thin films on Si substrates by radio frequency magnetron sputtering for the growth of textured Pb(Zr _0.53 Ti _0.47 )O ₃
journal, May 1995

Epitaxial YBa2Cu3O7 on Biaxially Textured Nickel (001): An Approach to Superconducting Tapes with High Critical Current Density
journal, November 1996

LaNiO/sub 3/: a promising material for contact with YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
journal, January 1995

High critical current density superconducting tapes by epitaxial deposition of YBa₂Cu₃O_x thick films on biaxially textured metals
journal, September 1996

Preparation of epitaxial metallic LaNiO ₃ films on SrTiO ₃ by metalorganic decomposition for the oriented growth of PbTiO ₃
journal, July 1996

High-J/sub c/ silver-sheathed Bi-based superconducting wires
journal, March 1991

Growth of biaxially textured buffer layers on rolled-Ni substrates by electron beam evaporation
journal, February 1997

Growth of C-axis oriented YBaCuO films on oxidized textured Ni sheets and on
journal, March 1991

Effects of target and template layer on the properties of highly crystalline superconducting a-axis films of Y1Ba2Cu3O7−x by DC-sputtering
journal, August 1993

Structural and transport properties of biaxially aligned YBa ₂ Cu ₃ O _{7− x} films on polycrystalline Ni‐based alloy with ion‐beam‐modified buffer layers
journal, August 1993

Superconducting YBa ₂ Cu ₃ O _6.8 films on metallic substrates using in situ laser deposition
journal, June 1990