Highly charged ion secondary ion mass spectroscopy
Abstract
A secondary ion mass spectrometer using slow, highly charged ions produced in an electron beam ion trap permits ultra-sensitive surface analysis and high spatial resolution simultaneously. The spectrometer comprises an ion source producing a primary ion beam of highly charged ions that are directed at a target surface, a mass analyzer, and a microchannel plate detector of secondary ions that are sputtered from the target surface after interaction with the primary beam. The unusually high secondary ion yield permits the use of coincidence counting, in which the secondary ion stops are detected in coincidence with a particular secondary ion. The association of specific molecular species can be correlated. The unique multiple secondary nature of the highly charged ion interaction enables this new analytical technique.
- Inventors:
-
- Livermore, CA
- San Francisco, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 874007
- Patent Number(s):
- 6291820
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- highly; charged; secondary; mass; spectroscopy; spectrometer; slow; produced; electron; beam; trap; permits; ultra-sensitive; surface; analysis; spatial; resolution; simultaneously; comprises; source; producing; primary; directed; target; analyzer; microchannel; plate; detector; sputtered; interaction; unusually; yield; coincidence; counting; stops; detected; particular; association; specific; molecular; species; correlated; unique; multiple; nature; enables; analytical; technique; channel plate; molecular species; mass spectrometer; electron beam; spatial resolution; target surface; microchannel plate; mass spectroscopy; primary beam; mass analyzer; highly charged; surface analysis; coincidence counting; molecular specie; spectrometer comprises; coincidence count; analytical technique; /250/
Citation Formats
Hamza, Alex V, Schenkel, Thomas, Barnes, Alan V, and Schneider, Dieter H. Highly charged ion secondary ion mass spectroscopy. United States: N. p., 2001.
Web.
Hamza, Alex V, Schenkel, Thomas, Barnes, Alan V, & Schneider, Dieter H. Highly charged ion secondary ion mass spectroscopy. United States.
Hamza, Alex V, Schenkel, Thomas, Barnes, Alan V, and Schneider, Dieter H. Mon .
"Highly charged ion secondary ion mass spectroscopy". United States. https://www.osti.gov/servlets/purl/874007.
@article{osti_874007,
title = {Highly charged ion secondary ion mass spectroscopy},
author = {Hamza, Alex V and Schenkel, Thomas and Barnes, Alan V and Schneider, Dieter H},
abstractNote = {A secondary ion mass spectrometer using slow, highly charged ions produced in an electron beam ion trap permits ultra-sensitive surface analysis and high spatial resolution simultaneously. The spectrometer comprises an ion source producing a primary ion beam of highly charged ions that are directed at a target surface, a mass analyzer, and a microchannel plate detector of secondary ions that are sputtered from the target surface after interaction with the primary beam. The unusually high secondary ion yield permits the use of coincidence counting, in which the secondary ion stops are detected in coincidence with a particular secondary ion. The association of specific molecular species can be correlated. The unique multiple secondary nature of the highly charged ion interaction enables this new analytical technique.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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Works referenced in this record:
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