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Title: Highly charged ion based time of flight emission microscope

Abstract

A highly charged ion based time-of-flight emission microscope has been designed, which improves the surface sensitivity of static SIMS measurements because of the higher ionization probability of highly charged ions. Slow, highly charged ions are produced in an electron beam ion trap and are directed to the sample surface. The sputtered secondary ions and electrons pass through a specially designed objective lens to a microchannel plate detector. This new instrument permits high surface sensitivity (10.sup.10 atoms/cm.sup.2), high spatial resolution (100 nm), and chemical structural information due to the high molecular ion yields. The high secondary ion yield permits coincidence counting, which can be used to enhance determination of chemical and topological structure and to correlate specific molecular species.

Inventors:
 [1];  [2];  [1];  [1];  [3]
  1. (Livermore, CA)
  2. (San Francisco, CA)
  3. (Albuquerque, NM)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873988
Patent Number(s):
6288394
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
highly; charged; based; time; flight; emission; microscope; time-of-flight; designed; improves; surface; sensitivity; static; sims; measurements; ionization; probability; slow; produced; electron; beam; trap; directed; sample; sputtered; secondary; electrons; pass; specially; objective; lens; microchannel; plate; detector; instrument; permits; 10; atoms; cm; spatial; resolution; 100; nm; chemical; structural; information; due; molecular; yields; yield; coincidence; counting; enhance; determination; topological; structure; correlate; specific; species; channel plate; sample surface; objective lens; light emission; specially designed; molecular species; electron beam; spatial resolution; microchannel plate; highly charged; coincidence counting; molecular specie; sims measurements; electrons pass; emission microscope; coincidence count; /250/315/

Citation Formats

Barnes, Alan V., Schenkel, Thomas, Hamza, Alex V., Schneider, Dieter H., and Doyle, Barney. Highly charged ion based time of flight emission microscope. United States: N. p., 2001. Web.
Barnes, Alan V., Schenkel, Thomas, Hamza, Alex V., Schneider, Dieter H., & Doyle, Barney. Highly charged ion based time of flight emission microscope. United States.
Barnes, Alan V., Schenkel, Thomas, Hamza, Alex V., Schneider, Dieter H., and Doyle, Barney. Mon . "Highly charged ion based time of flight emission microscope". United States. https://www.osti.gov/servlets/purl/873988.
@article{osti_873988,
title = {Highly charged ion based time of flight emission microscope},
author = {Barnes, Alan V. and Schenkel, Thomas and Hamza, Alex V. and Schneider, Dieter H. and Doyle, Barney},
abstractNote = {A highly charged ion based time-of-flight emission microscope has been designed, which improves the surface sensitivity of static SIMS measurements because of the higher ionization probability of highly charged ions. Slow, highly charged ions are produced in an electron beam ion trap and are directed to the sample surface. The sputtered secondary ions and electrons pass through a specially designed objective lens to a microchannel plate detector. This new instrument permits high surface sensitivity (10.sup.10 atoms/cm.sup.2), high spatial resolution (100 nm), and chemical structural information due to the high molecular ion yields. The high secondary ion yield permits coincidence counting, which can be used to enhance determination of chemical and topological structure and to correlate specific molecular species.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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