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Title: Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3

Abstract

A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.

Inventors:
 [1];  [2];  [3]
  1. Alameda, CA
  2. Berkeley, CA
  3. Albany, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
873970
Patent Number(s):
6285049
Assignee:
United States of America as represented by United States Department (Washington, DC)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
loss; composition; baxsryca1-x-ytio3; ba0; 12-0; 25sr0; 35-0; 47ca0; 32-0; 53tio3; dielectric; thin-film; material; microwave; applications; including; capacitor; comprising; barium; strontium; calcium; titanium; perovskite; type; sr; 1-x-y; provided; method; film; formula; wide; compositional; range; single; deposition; process; deposition process; film comprising; film material; microwave applications; strontium calcium; thin-film material; thin-film comprising; loss composition; barium strontium; dielectric thin-film; /257/438/

Citation Formats

Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3. United States: N. p., 2001. Web.
Xiang, Xiao-Dong, Chang, Hauyee, & Takeuchi, Ichiro. Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3. United States.
Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Mon . "Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3". United States. https://www.osti.gov/servlets/purl/873970.
@article{osti_873970,
title = {Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3},
author = {Xiang, Xiao-Dong and Chang, Hauyee and Takeuchi, Ichiro},
abstractNote = {A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}