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Title: Liquid zone seal

Abstract

A seal assembly that provides a means for establishing multiple pressure zones within a system. The seal assembly combines a plate extending from the inner wall of a housing or inner enclosure that intersects with and is immersed in the fluid contained in a well formed in a tray contained within the enclosure. The fluid is a low vapor pressure oil, chemically inert and oxidation resistant. The use of a fluid as the sealing component provides a seal that is self-healing and mechanically robust not subject to normal mechanical wear, breakage, and formation of cracks or pinholes and decouples external mechanical vibrations from internal structural members.

Inventors:
 [1]
  1. Dublin, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873947
Patent Number(s):
6279601
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
liquid; zone; seal; assembly; provides; means; establishing; multiple; pressure; zones; combines; plate; extending; inner; wall; housing; enclosure; intersects; immersed; fluid; contained; formed; tray; vapor; oil; chemically; inert; oxidation; resistant; sealing; component; self-healing; mechanically; robust; subject; normal; mechanical; wear; breakage; formation; cracks; pinholes; decouples; external; vibrations; internal; structural; chemically inert; seal assembly; inner wall; vapor pressure; oxidation resistant; plate extending; fluid contained; mechanically robust; external mechanical; inner enclosure; component provide; /137/355/

Citation Formats

Klebanoff, Leonard E. Liquid zone seal. United States: N. p., 2001. Web.
Klebanoff, Leonard E. Liquid zone seal. United States.
Klebanoff, Leonard E. Mon . "Liquid zone seal". United States. https://www.osti.gov/servlets/purl/873947.
@article{osti_873947,
title = {Liquid zone seal},
author = {Klebanoff, Leonard E},
abstractNote = {A seal assembly that provides a means for establishing multiple pressure zones within a system. The seal assembly combines a plate extending from the inner wall of a housing or inner enclosure that intersects with and is immersed in the fluid contained in a well formed in a tray contained within the enclosure. The fluid is a low vapor pressure oil, chemically inert and oxidation resistant. The use of a fluid as the sealing component provides a seal that is self-healing and mechanically robust not subject to normal mechanical wear, breakage, and formation of cracks or pinholes and decouples external mechanical vibrations from internal structural members.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}