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Title: High efficiency replicated x-ray optics and fabrication method

Abstract

Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.

Inventors:
 [1];  [2];  [3]
  1. (Palo Alto, CA)
  2. Oakland, CA
  3. Fremont, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873946
Patent Number(s):
6278764
Assignee:
Regents of Unviersity of California (Oakland, CA)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
efficiency; replicated; x-ray; optics; fabrication; method; fabricated; sputter; deposition; reflecting; layers; super-polished; reusable; mandrel; strengthened; supporting; multilayer; results; stronger; stress-relieved; surfaces; deform; separation; enhances; ability; replica; degradation; surface; roughness; comparable; smoothness; outer; layer; electrodeposited; deposited; directly; facilitate; removal; layered; tubular; optic; device; deformation; inner; shell; single; grazing; reflection; mirror; resonant; resulting; wide; variety; applications; including; lithography; microscopy; radiography; tomography; crystallography; x-ray optics; fabrication method; sputter deposition; reflecting surfaces; single layer; outer layer; reflecting surface; wide variety; surface roughness; multilayer mirror; facilitate removal; replicated x-ray; reflecting layers; optic device; sputter deposit; reflecting layer; deposited directly; /378/

Citation Formats

Barbee, Jr., Troy W., Lane, Stephen M, and Hoffman, Donald E. High efficiency replicated x-ray optics and fabrication method. United States: N. p., 2001. Web.
Barbee, Jr., Troy W., Lane, Stephen M, & Hoffman, Donald E. High efficiency replicated x-ray optics and fabrication method. United States.
Barbee, Jr., Troy W., Lane, Stephen M, and Hoffman, Donald E. Mon . "High efficiency replicated x-ray optics and fabrication method". United States. https://www.osti.gov/servlets/purl/873946.
@article{osti_873946,
title = {High efficiency replicated x-ray optics and fabrication method},
author = {Barbee, Jr., Troy W. and Lane, Stephen M and Hoffman, Donald E},
abstractNote = {Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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Works referenced in this record:

Multilayer option for conical foil x-ray mirrors
conference, July 1997


Grazing incidence and multilayer x-ray optical systems
conference, July 1997


Electroform replication used for multiple x-ray mirror production
journal, January 1984


Design and fabrication of low-cost X-ray mirrors
journal, October 1996