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Title: Optical stress generator and detector

Abstract

Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.

Inventors:
 [1];  [2]
  1. (Barrington, RI)
  2. (Duxbury, MA)
Issue Date:
Research Org.:
Brown University
OSTI Identifier:
873920
Patent Number(s):
6271921
Assignee:
Brown University Research Foundation (Providence, NY) CHO
DOE Contract Number:  
FG02-86ER45267
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
optical; stress; generator; detector; disclosed; characterization; films; interfaces; measurements; mechanical; thermal; properties; light; absorbed; film; structure; change; transmission; reflection; measured; analyzed; information; ultrasonic; waves; produced; obtained; measurement; methods; apparatus; determination; thickness; speed; accuracy; improved; compared; earlier; elastic; including; presence; roughness; defects; measurement methods; ultrasonic wave; optical stress; earlier methods; stress generator; optical transmission; ultrasonic waves; optical properties; thermal properties; measurement method; improved compared; /356/

Citation Formats

Maris, Humphrey J., and Stoner, Robert J. Optical stress generator and detector. United States: N. p., 2001. Web.
Maris, Humphrey J., & Stoner, Robert J. Optical stress generator and detector. United States.
Maris, Humphrey J., and Stoner, Robert J. Mon . "Optical stress generator and detector". United States. https://www.osti.gov/servlets/purl/873920.
@article{osti_873920,
title = {Optical stress generator and detector},
author = {Maris, Humphrey J. and Stoner, Robert J},
abstractNote = {Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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