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Title: Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film

Abstract

Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

Inventors:
 [1];  [2];  [3]
+ Show Inventor Affiliations
  1. Knoxville, TN
  2. Oak Ridge, TN
  3. Kingston, TN
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
873874
Patent Number(s):
6263736
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
electrostatically; tunable; resonance; frequency; beam; utilizing; stress-sensitive; film; methods; apparatus; detecting; particular; frequencies; acoustic; vibration; utilize; electrostatically-tunable; element; coating; means; providing; electrostatic; force; controllably; deflect; changing; stiffness; determined; response; acoustical; exposed; detected; resonance frequency; sensitive film; particular frequency; frequency beam; static force; acoustic vibration; /73/310/361/

Citation Formats

Thundat, Thomas G, Wachter, Eric A, and Davis, J Kenneth. Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film. United States: N. p., 2001. Web.
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Thundat, Thomas G, Wachter, Eric A, & Davis, J Kenneth. Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film. United States.
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Thundat, Thomas G, Wachter, Eric A, and Davis, J Kenneth. Mon . "Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film". United States. https://www.osti.gov/servlets/purl/873874.
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@article{osti_873874,
title = {Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film},
author = {Thundat, Thomas G and Wachter, Eric A and Davis, J Kenneth},
abstractNote = {Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}
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Works referenced in this record:

Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995

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