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Title: Fully depleted back illuminated CCD

Abstract

A backside illuminated charge coupled device (CCD) is formed of a relatively thick high resistivity photon sensitive silicon substrate, with frontside electronic circuitry, and an optically transparent backside ohmic contact for applying a backside voltage which is at least sufficient to substantially fully deplete the substrate. A greater bias voltage which overdepletes the substrate may also be applied. One way of applying the bias voltage to the substrate is by physically connecting the voltage source to the ohmic contact. An alternate way of applying the bias voltage to the substrate is to physically connect the voltage source to the frontside of the substrate, at a point outside the depletion region. Thus both frontside and backside contacts can be used for backside biasing to fully deplete the substrate. Also, high resistivity gaps around the CCD channels and electrically floating channel stop regions can be provided in the CCD array around the CCD channels. The CCD array forms an imaging sensor useful in astronomy.

Inventors:
 [1]
  1. Hercules, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
873848
Patent Number(s):
6259085
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
depleted; illuminated; ccd; backside; charge; coupled; device; formed; relatively; thick; resistivity; photon; sensitive; silicon; substrate; frontside; electronic; circuitry; optically; transparent; ohmic; contact; applying; voltage; sufficient; substantially; deplete; bias; overdepletes; applied; physically; connecting; source; alternate; connect; outside; depletion; region; contacts; biasing; gaps; channels; electrically; floating; channel; stop; regions; provided; array; forms; imaging; sensor; useful; astronomy; optically transparent; electronic circuit; charge coupled; coupled device; relatively thick; voltage source; silicon substrate; electronic circuitry; ohmic contact; bias voltage; sensitive silicon; ccd array; photon sensitive; resistivity photon; electrically floating; /250/257/

Citation Formats

Holland, Stephen Edward. Fully depleted back illuminated CCD. United States: N. p., 2001. Web.
Holland, Stephen Edward. Fully depleted back illuminated CCD. United States.
Holland, Stephen Edward. Mon . "Fully depleted back illuminated CCD". United States. https://www.osti.gov/servlets/purl/873848.
@article{osti_873848,
title = {Fully depleted back illuminated CCD},
author = {Holland, Stephen Edward},
abstractNote = {A backside illuminated charge coupled device (CCD) is formed of a relatively thick high resistivity photon sensitive silicon substrate, with frontside electronic circuitry, and an optically transparent backside ohmic contact for applying a backside voltage which is at least sufficient to substantially fully deplete the substrate. A greater bias voltage which overdepletes the substrate may also be applied. One way of applying the bias voltage to the substrate is by physically connecting the voltage source to the ohmic contact. An alternate way of applying the bias voltage to the substrate is to physically connect the voltage source to the frontside of the substrate, at a point outside the depletion region. Thus both frontside and backside contacts can be used for backside biasing to fully deplete the substrate. Also, high resistivity gaps around the CCD channels and electrically floating channel stop regions can be provided in the CCD array around the CCD channels. The CCD array forms an imaging sensor useful in astronomy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}