Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy
Abstract
A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873844
- Patent Number(s):
- 6258615
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; varying; characteristic; optical; vertical; cavity; structure; formed; metalorganic; vapor; phase; epitaxy; process; forming; array; resonant; structures; detection; emission; wavelengths; selective; growth; sag; conjunction; annular; masks; differing; dimensions; control; thickness; chemical; composition; materials; cavities; movpe; build; arrays; chemical composition; structure formed; vapor phase; phase epitaxy; vertical cavity; organic vapor; cavity structure; optical resonant; resonant structure; /438/
Citation Formats
Hou, Hong Q, Coltrin, Michael E, and Choquette, Kent D. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. United States: N. p., 2001.
Web.
Hou, Hong Q, Coltrin, Michael E, & Choquette, Kent D. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. United States.
Hou, Hong Q, Coltrin, Michael E, and Choquette, Kent D. Mon .
"Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy". United States. https://www.osti.gov/servlets/purl/873844.
@article{osti_873844,
title = {Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy},
author = {Hou, Hong Q and Coltrin, Michael E and Choquette, Kent D},
abstractNote = {A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.