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Title: Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy

Abstract

A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.

Inventors:
 [1];  [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873844
Patent Number(s):
6258615
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; varying; characteristic; optical; vertical; cavity; structure; formed; metalorganic; vapor; phase; epitaxy; process; forming; array; resonant; structures; detection; emission; wavelengths; selective; growth; sag; conjunction; annular; masks; differing; dimensions; control; thickness; chemical; composition; materials; cavities; movpe; build; arrays; chemical composition; structure formed; vapor phase; phase epitaxy; vertical cavity; organic vapor; cavity structure; optical resonant; resonant structure; /438/

Citation Formats

Hou, Hong Q., Coltrin, Michael E., and Choquette, Kent D. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. United States: N. p., 2001. Web.
Hou, Hong Q., Coltrin, Michael E., & Choquette, Kent D. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. United States.
Hou, Hong Q., Coltrin, Michael E., and Choquette, Kent D. Mon . "Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy". United States. https://www.osti.gov/servlets/purl/873844.
@article{osti_873844,
title = {Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy},
author = {Hou, Hong Q. and Coltrin, Michael E. and Choquette, Kent D.},
abstractNote = {A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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