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Title: Lamp system for uniform semiconductor wafer heating

Abstract

A lamp system with a very soft high-intensity output is provided over a large area by water cooling a long-arc lamp inside a diffuse reflector of polytetrafluorethylene (PTFE) and titanium dioxide (TiO.sub.2) white pigment. The water is kept clean and pure by a one micron particulate filter and an activated charcoal/ultraviolet irradiation system that circulates and de-ionizes and biologically sterilizes the coolant water at all times, even when the long-arc lamp is off.

Inventors:
 [1];  [1]
  1. (Livermore, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873810
Patent Number(s):
6252203
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
lamp; uniform; semiconductor; wafer; heating; soft; high-intensity; output; provided; water; cooling; long-arc; inside; diffuse; reflector; polytetrafluorethylene; ptfe; titanium; dioxide; white; pigment; kept; clean; pure; micron; particulate; filter; activated; charcoal; ultraviolet; irradiation; circulates; de-ionizes; biologically; sterilizes; coolant; times; coolant water; activated charcoal; semiconductor wafer; titanium dioxide; particulate filter; water cooling; ultraviolet irradiation; long-arc lamp; diffuse reflector; soft high-intensity; uniform semiconductor; high-intensity output; lamp inside; /219/118/362/392/

Citation Formats

Zapata, Luis E., and Hackel, Lloyd. Lamp system for uniform semiconductor wafer heating. United States: N. p., 2001. Web.
Zapata, Luis E., & Hackel, Lloyd. Lamp system for uniform semiconductor wafer heating. United States.
Zapata, Luis E., and Hackel, Lloyd. Mon . "Lamp system for uniform semiconductor wafer heating". United States. https://www.osti.gov/servlets/purl/873810.
@article{osti_873810,
title = {Lamp system for uniform semiconductor wafer heating},
author = {Zapata, Luis E. and Hackel, Lloyd},
abstractNote = {A lamp system with a very soft high-intensity output is provided over a large area by water cooling a long-arc lamp inside a diffuse reflector of polytetrafluorethylene (PTFE) and titanium dioxide (TiO.sub.2) white pigment. The water is kept clean and pure by a one micron particulate filter and an activated charcoal/ultraviolet irradiation system that circulates and de-ionizes and biologically sterilizes the coolant water at all times, even when the long-arc lamp is off.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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