Fourier-transform and global contrast interferometer alignment methods
Abstract
Interferometric methods are presented to facilitate alignment of image-plane components within an interferometer and for the magnified viewing of interferometer masks in situ. Fourier-transforms are performed on intensity patterns that are detected with the interferometer and are used to calculate pseudo-images of the electric field in the image plane of the test optic where the critical alignment of various components is being performed. Fine alignment is aided by the introduction and optimization of a global contrast parameter that is easily calculated from the Fourier-transform.
- Inventors:
-
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 873765
- Patent Number(s):
- 6239878
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- fourier-transform; global; contrast; interferometer; alignment; methods; interferometric; facilitate; image-plane; components; magnified; viewing; masks; situ; fourier-transforms; performed; intensity; patterns; detected; calculate; pseudo-images; electric; field; image; plane; optic; critical; various; fine; aided; introduction; optimization; parameter; easily; calculated; image plane; electric field; various components; alignment methods; intensity patterns; intensity pattern; facilitate alignment; alignment method; various component; /356/
Citation Formats
Goldberg, Kenneth A. Fourier-transform and global contrast interferometer alignment methods. United States: N. p., 2001.
Web.
Goldberg, Kenneth A. Fourier-transform and global contrast interferometer alignment methods. United States.
Goldberg, Kenneth A. Mon .
"Fourier-transform and global contrast interferometer alignment methods". United States. https://www.osti.gov/servlets/purl/873765.
@article{osti_873765,
title = {Fourier-transform and global contrast interferometer alignment methods},
author = {Goldberg, Kenneth A},
abstractNote = {Interferometric methods are presented to facilitate alignment of image-plane components within an interferometer and for the magnified viewing of interferometer masks in situ. Fourier-transforms are performed on intensity patterns that are detected with the interferometer and are used to calculate pseudo-images of the electric field in the image plane of the test optic where the critical alignment of various components is being performed. Fine alignment is aided by the introduction and optimization of a global contrast parameter that is easily calculated from the Fourier-transform.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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Works referenced in this record:
Hybrid holographic microscopy free of conjugate and zero-order images
journal, January 1999
- Takaki, Yasuhiro; Kawai, Hiroki; Ohzu, Hitoshi
- Applied Optics, Vol. 38, Issue 23