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Title: Process for producing radiation-induced self-terminating protective coatings on a substrate

Abstract

A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.

Inventors:
 [1]
  1. Dublin, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873733
Patent Number(s):
6231930
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
process; producing; radiation-induced; self-terminating; protective; coatings; substrate; gas; radiation; produce; coating; substantially; void-free; molecular; scale; degradation; resistant; deposit; apprxeq; 5-20; ang; critical; surfaces; protection; degradative; processes; including; corrosion; contamination; protective coatings; protective coating; substantially void; processes including; /427/

Citation Formats

Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate. United States: N. p., 2001. Web.
Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate. United States.
Klebanoff, Leonard E. Mon . "Process for producing radiation-induced self-terminating protective coatings on a substrate". United States. https://www.osti.gov/servlets/purl/873733.
@article{osti_873733,
title = {Process for producing radiation-induced self-terminating protective coatings on a substrate},
author = {Klebanoff, Leonard E},
abstractNote = {A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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