Process for producing radiation-induced self-terminating protective coatings on a substrate

Klebanoff, Leonard E

Title: Process for producing radiation-induced self-terminating protective coatings on a substrate

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Abstract

A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.

Inventors:

Klebanoff, Leonard E ^[1]

Dublin, CA

Issue Date:: 2001-01-01

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 873733

Patent Number(s):: 6231930

Assignee:: EUV LLC (Santa Clara, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL

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B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B05D1/185 - {applying monomolecular layers
B05D1/60 - {Deposition of organic layers from vapour phase
B05D3/067 - {Curing or cross-linking the coating}
B05D3/068 - {using ionising radiations

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: process; producing; radiation-induced; self-terminating; protective; coatings; substrate; gas; radiation; produce; coating; substantially; void-free; molecular; scale; degradation; resistant; deposit; apprxeq; 5-20; ang; critical; surfaces; protection; degradative; processes; including; corrosion; contamination; protective coatings; protective coating; substantially void; processes including; /427/

Citation Formats


                    Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate.  United States: N. p., 2001. 
        Web.

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                    Klebanoff, Leonard E. Process for producing radiation-induced self-terminating protective coatings on a substrate.  United States.

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                    Klebanoff, Leonard E. Mon .  
        "Process for producing radiation-induced self-terminating protective coatings on a substrate".  United States.  https://www.osti.gov/servlets/purl/873733.

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@article{osti_873733,

  title        = {Process for producing radiation-induced self-terminating protective coatings on a substrate},

  author       = {Klebanoff, Leonard E},

  abstractNote = {A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2001},

  month        = {1}

}

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